Shutdown asml SNF 2009-10-05 00:38:32: The wafer handler stopped while moving down

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Oct 5 09:04:05 PDT 2009


I suspect that original error "Empty or Input cassette not available was caused by mis-positioned cassette on plateform. was able to recreate that problem. At some point , system got stuck in batch control screen and could not cancel or exit. Had to restart the application software and re-initialize the system. Tested system function with qual wafers- all OK.




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