Problem asml SNF 2009-10-05 09:05:26: 2 hotspots on qual wafer 10/5

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Oct 5 09:05:27 PDT 2009


2 hotspots on test wafer. 1 at 3 Oclock and 1 at 8 Oclock, both near the edge of the wafer. Will clean and retest.




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