Problem asml SNF 2009-10-05 09:05:26: 2 hotspots on qual wafer 10/5

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Oct 5 09:48:49 PDT 2009

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Cleaned the E-Echuck with special tooling. Retest looks good. Stepper ready to use.

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