Problem asml SNF 2009-10-12 05:10:23: Wafer Handler not working

alsune at snf.stanford.edu alsune at snf.stanford.edu
Mon Oct 12 05:10:24 PDT 2009


The asml failed to load the wafers and printed out an error message. It gave me an option to fast start up but decided to just remove the wafers since I'm not confident what it should do. I didn't shut down the machine in case there is someone who can reinitialize the handler




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