Problem asml SNF 2009-10-12 05:10:23: Wafer Handler not working

[alsune at snf.stanford.edu]

The asml failed to load the wafers and printed out an error message. It gave me an option to fast start up but decided to just remove the wafers since I'm not confident what it should do. I didn't shut down the machine in case there is someone who can reinitialize the handler