Problem asml SNF 2009-10-12 05:10:23: Wafer Handler not working

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Oct 12 09:02:10 PDT 2009


Checked errors. Looks like system failed carrier inspection on port # 3(output elevator).  Re-initialized wafer handling and tested by cycling wafers- All OK. Checked port #3 cover alignment and latching mechanism-OK. Daily quals completed- All OK. system up and ready to use.




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