Problem asml SNF 2009-10-12 05:10:23: Wafer Handler not working

[gsosa at snf.stanford.edu]

Checked errors. Looks like system failed carrier inspection on port # 3(output elevator).  Re-initialized wafer handling and tested by cycling wafers- All OK. Checked port #3 cover alignment and latching mechanism-OK. Daily quals completed- All OK. system up and ready to use.