Problem asml SNF 2009-10-24 16:51:13: wafer handler failed
haiwei at snf.stanford.edu
haiwei at snf.stanford.edu
Sat Oct 24 16:51:13 PDT 2009
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Problem asml SNF 2009-10-24 05:34:26: HInges broken
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Problem asml SNF 2009-10-24 16:51:13: wafer handler failed
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the input casset was lowered halfway and stopped.
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Problem asml SNF 2009-10-24 16:51:13: wafer handler failed
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