Comment asml SNF 2009-10-27 17:35:48: ASML Stepper OK to use for 4in wafer

joho at snf.stanford.edu joho at snf.stanford.edu
Tue Oct 27 17:35:49 PDT 2009


Completed ASML DEMO. System is okay for 4in wafer exposures. System is stable based on IQC and Uniformity being OK.
ASML CS Engineer, Joey




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