Comment asml SNF 2009-10-27 17:35:48: ASML Stepper OK to use for 4in wafer

joho at joho at
Tue Oct 27 17:35:49 PDT 2009

Completed ASML DEMO. System is okay for 4in wafer exposures. System is stable based on IQC and Uniformity being OK.
ASML CS Engineer, Joey

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