Comment asml SNF 2009-09-04 14:12:09: Top Side Align OK, Back Side Not OK

joho at snf.stanford.edu joho at snf.stanford.edu
Fri Sep 4 14:12:10 PDT 2009


All,
Back Side Align is still not repeatable. Calibrations today brought some parameters in spec for Back Side. Releasing the ASML stepper for Front Side Align Only, No Back Side Align.
Joey
ASML CS Engineer




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