Comment asml SNF 2009-09-04 14:12:09: Top Side Align OK, Back Side Not OK

joho at joho at
Fri Sep 4 14:12:10 PDT 2009

Back Side Align is still not repeatable. Calibrations today brought some parameters in spec for Back Side. Releasing the ASML stepper for Front Side Align Only, No Back Side Align.
ASML CS Engineer

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