Shutdown asml SNF 2009-09-18 22:43:47: Wafer Stuck in p-chuck

joho at snf.stanford.edu joho at snf.stanford.edu
Mon Sep 21 14:28:57 PDT 2009


The wafer that was lost in the system was found broken in the tool. Cleaned the Wafer Stage system, and Wafer Handling system. Wafers were then ran through the system with no issues. Calibrated the system, and cycled more wafers. As well as run Wafer Handling reproducibility tests to ensure the system was stable. System checked for not spots, and none were found. Releasing the remaing ASML time.
Joey, and Mark
ASML CS Engineer




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