Shutdown asml SNF 2009-09-22 08:29:23: ASML TCU R&R

joho at joho at
Wed Sep 23 16:04:07 PDT 2009

System is ready for production. The system stabilized at 7PM yesterday night. Quals completed on the tool, and all item's passed specifications. Exposure Chuck was also cleaned. Releasing the tool to Stanford.
- Joey

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