September 2009 Archives by author
Starting: Tue Sep 1 09:28:55 PDT 2009
Ending: Wed Sep 30 18:31:51 PDT 2009
Messages: 67
- Comment asml SNF 2009-08-21 14:07:42: System up ok to use
gsosa at snf.stanford.edu
- Comment asml SNF 2009-08-25 08:36:19: ASML 3D Calibration
gsosa at snf.stanford.edu
- Comment asml SNF 2009-08-25 10:08:33: E Chuck & 3D Optics Dirty
gsosa at snf.stanford.edu
- Comment asml SNF 2009-08-26 07:41:09: ASML 3D Calibration
gsosa at snf.stanford.edu
- Comment asml SNF 2009-08-26 10:45:03: 3D Calibration ok
gsosa at snf.stanford.edu
- Comment asml SNF 2009-08-26 10:46:06: Release ASML Reservation from 11:00 - 14:00
gsosa at snf.stanford.edu
- Comment asml SNF 2009-08-27 09:27:03: ASML Released Reservation 9:30-11:00
gsosa at snf.stanford.edu
- Comment asml SNF 2009-08-27 13:16:05: ASML Released tool, free until 14:00
gsosa at snf.stanford.edu
- Comment asml SNF 2009-08-28 09:39:08: ASML Released Tool Reservation 9:30-14:00
gsosa at snf.stanford.edu
- Comment asml SNF 2009-08-28 11:31:42: System ok to use
gsosa at snf.stanford.edu
- Comment asml SNF 2009-09-01 09:28:55: ASML Released Reservation 9:30-14:00
gsosa at snf.stanford.edu
- Comment asml SNF 2009-09-02 08:37:34: ASML Released Reservations 8:30-11:00
gsosa at snf.stanford.edu
- Comment asml SNF 2009-09-02 15:30:36: 3D Cal not in spec, front side ok to use, in spec
gsosa at snf.stanford.edu
- Comment asml SNF 2009-09-03 11:34:06: ASML Released Reservations 11:30-14:00
gsosa at snf.stanford.edu
- Comment asml SNF 2009-09-04 14:12:09: Top Side Align OK, Back Side Not OK
gsosa at snf.stanford.edu
- Comment asml SNF 2009-09-08 09:26:59: ASML Released Reservations 9:30-14:00
gsosa at snf.stanford.edu
- Comment asml SNF 2009-09-11 09:18:40: Hotspots 9/11/09
gsosa at snf.stanford.edu
- Comment asml SNF 2009-09-09 08:56:05: Hot Spot lower left corner
gsosa at snf.stanford.edu
- Comment asml SNF 2009-09-09 10:47:18: Cleaned E-Chuck, Hotspot ok
gsosa at snf.stanford.edu
- Comment asml SNF 2009-09-09 10:48:34: ASML Released Reservations 11:00-14:00
gsosa at snf.stanford.edu
- Comment asml SNF 2009-09-10 12:35:29: 3D Calibration in spec. OK to use Backside Align
gsosa at snf.stanford.edu
- Comment asml SNF 2009-09-10 12:54:58: ASML Released Reservation 13:00-14:00
gsosa at snf.stanford.edu
- Comment asml SNF 2009-09-15 09:24:39: ASML Released Reservations 9:30&10:00
gsosa at snf.stanford.edu
- Comment asml SNF 2009-09-15 10:29:57: ASML Released Reservations 10:30-14:00
gsosa at snf.stanford.edu
- Comment asml SNF 2009-09-16 14:52:52: ASML Released Reservation 15:00 & 15:30
gsosa at snf.stanford.edu
- Comment asml SNF 2009-09-22 14:45:57: Status 9/22
gsosa at snf.stanford.edu
- Shutdown asml SNF 2009-09-18 22:43:47: Wafer Stuck in p-chuck
haiwei at snf.stanford.edu
- Problem asml SNF 2009-09-23 18:51:08: 2 wafers stuck in system
jimkruger at snf.stanford.edu
- Comment asml SNF 2009-09-04 14:12:09: Top Side Align OK, Back Side Not OK
joho at snf.stanford.edu
- Comment asml SNF 2009-09-14 13:26:09: ASML work complete
joho at snf.stanford.edu
- Shutdown asml SNF 2009-09-18 22:43:47: Wafer Stuck in p-chuck
joho at snf.stanford.edu
- Shutdown asml SNF 2009-09-22 08:29:23: ASML TCU R&R
joho at snf.stanford.edu
- Comment asml SNF 2009-09-01 09:28:55: ASML Released Reservation 9:30-14:00
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-02 08:37:34: ASML Released Reservations 8:30-11:00
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-02 15:30:36: 3D Cal not in spec, front side ok to use, in spec
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-03 11:34:06: ASML Released Reservations 11:30-14:00
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-08 09:26:59: ASML Released Reservations 9:30-14:00
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-09 08:56:05: Hot Spot lower left corner
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-09 10:47:18: Cleaned E-Chuck, Hotspot ok
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-09 10:48:34: ASML Released Reservations 11:00-14:00
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-10 12:35:29: 3D Calibration in spec. OK to use Backside Align
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-10 12:54:58: ASML Released Reservation 13:00-14:00
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-11 13:16:23: Cleaned E-Chuck, Hotspot test ok
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-15 08:30:14: Hotspot lower center & lower left of wafer
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-15 09:17:40: Cleaned E-Chuck Hotspot ck ok
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-15 09:24:39: ASML Released Reservations 9:30&10:00
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-15 10:29:57: ASML Released Reservations 10:30-14:00
lindaohara at snf.stanford.edu
- Problem asml SNF 2009-09-15 21:07:08: partial exposure
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-16 08:11:30: Test Wafers exposed okay
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-16 14:51:06: Completed QPM Day 1
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-16 14:52:19: ASML ok to use
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-16 14:52:52: ASML Released Reservation 15:00 & 15:30
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-17 16:00:36: ASML QPM Day 2 completed
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-18 08:29:46: Hot Spot upper left corner
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-18 10:56:37: Cleaned E-Chuck Hotspot Ck Ok
lindaohara at snf.stanford.edu
- Shutdown asml SNF 2009-09-22 08:29:23: ASML TCU R&R
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-24 07:32:46: Removed 2 wafers
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-24 07:32:46: Removed 2 wafers
lindaohara at snf.stanford.edu
- Problem asml SNF 2009-09-23 18:51:08: 2 wafers stuck in system
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-24 08:18:27: Test wafer ok
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-25 08:25:09: ASML Released Reservations 8:30-9:30
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-29 07:31:47: 3" ASML DEMO
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-29 14:09:01: 3" ASML Demo Completed
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-29 14:09:42: ASML Released Reservations 14:00&14:30
lindaohara at snf.stanford.edu
- Comment asml SNF 2009-09-30 11:07:34: ASML Released Reservations 11:00-14:00&15:00-16:00
lindaohara at snf.stanford.edu
- Problem asml SNF 2009-09-15 21:07:08: partial exposure
rostam at snf.stanford.edu
- Problem asml SNF 2009-09-30 18:31:50: Wafers Stuck
sdogbe at snf.stanford.edu
Last message date:
Wed Sep 30 18:31:51 PDT 2009
Archived on: Sun Dec 23 08:44:15 PST 2012
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