From lindaohara at snf.stanford.edu Thu Apr 1 07:53:30 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 1 Apr 2010 07:53:30 -0700 Subject: Comment asml SNF 2010-04-01 07:53:29: ASML DEMO Message-ID: From gsosa at snf.stanford.edu Thu Apr 1 09:06:07 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 1 Apr 2010 09:06:07 -0700 Subject: Problem asml SNF 2010-03-31 17:56:50: elevator case broken Message-ID: Replaced both hinges on port 4( loader) From kreifels at snf.stanford.edu Thu Apr 1 13:59:32 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Thu, 1 Apr 2010 13:59:32 -0700 Subject: Comment asml SNF 2010-04-01 13:59:32: hotspot removed Message-ID: was reported this morning that there was a hotspot at the 8 oclock position, hot spot was cleaned and recheck, all contamination is removed. From lindaohara at snf.stanford.edu Fri Apr 2 11:05:31 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 2 Apr 2010 11:05:31 -0700 Subject: Comment asml SNF 2010-04-02 11:05:30: ASML Released Reservations 11:00-14:00 Message-ID: From lindaohara at snf.stanford.edu Mon Apr 5 07:31:30 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Mon, 5 Apr 2010 07:31:30 -0700 Subject: Comment asml SNF 2010-04-05 07:31:30: Hotspot 04/02 Friday Message-ID: Found Hotspot at 12 O'Clock postion. Gary cleaned E-Chuck. Hotspot ck ok. From filip at snf.stanford.edu Mon Apr 5 18:36:46 2010 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Mon, 5 Apr 2010 18:36:46 -0700 Subject: Comment asml SNF 2010-04-05 18:36:45: found reticle box open Message-ID: please close them immediately after use. Dust particles can land on the mask, and give you 'extra' features... From lindaohara at snf.stanford.edu Tue Apr 6 08:12:25 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 6 Apr 2010 08:12:25 -0700 Subject: Comment asml SNF 2010-04-06 08:12:24: ASML Quarterly PM Message-ID: From kreifels at snf.stanford.edu Tue Apr 6 15:47:46 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Tue, 6 Apr 2010 15:47:46 -0700 Subject: Comment asml SNF 2010-04-06 15:47:46: QPM day 1 is completed hotspot is gone. Message-ID: - Completed the day 1of the Quarterly PM, will finish day to tom. - Cleaned the chuck 2 times for hotspot, hot spot is gone. - Returned the system to stanford. From lindaohara at snf.stanford.edu Wed Apr 7 08:43:22 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 7 Apr 2010 08:43:22 -0700 Subject: Comment asml SNF 2010-04-07 08:43:22: ASML Quarterly PM Day2 Message-ID: From kreifels at snf.stanford.edu Wed Apr 7 14:48:20 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Wed, 7 Apr 2010 14:48:20 -0700 Subject: Comment asml SNF 2010-04-07 14:48:19: Quarterly PM is completed Message-ID: QPM is completed and system is returned to Stanford. From mrlin at snf.stanford.edu Fri Apr 9 17:15:13 2010 From: mrlin at snf.stanford.edu (mrlin at snf.stanford.edu) Date: Fri, 9 Apr 2010 17:15:13 -0700 Subject: Problem asml SNF 2010-04-09 17:15:12: ASML Software Bug(?) Message-ID: I was running 2 images, each from a diffrent mask, on 1 layer. Despite having a correct job file, when I hit run, ASML did not use the correct mask for the correct image. It appears to be a software issue. I'm not sure whether it is a bug, or whether it is an obscure setup thing that I did. Also, I'm not sure if this is a general problem, or just specific to my job file. However, this has never happened to me before... so I think it is not a user error. Also, the problem is repropducible. So it's not a 1-time thing. I have video taped it, so I can show you. From king at snf.stanford.edu Fri Apr 9 22:19:25 2010 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 9 Apr 2010 22:19:25 -0700 Subject: Comment asml SNF 2010-04-09 22:19:24: It worked for 1 layer on 1 mask Message-ID: No problems. From lindaohara at snf.stanford.edu Tue Apr 13 13:30:17 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 13 Apr 2010 13:30:17 -0700 Subject: Comment asml SNF 2010-04-13 13:30:17: ASML Released 13:30 Reservation Message-ID: From mahnaz at snf.stanford.edu Wed Apr 14 09:36:05 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 14 Apr 2010 09:36:05 -0700 Subject: Comment asml SNF 2010-04-13 13:30:17: ASML Released 13:30 Reservation Message-ID: From mahnaz at snf.stanford.edu Wed Apr 14 09:36:17 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 14 Apr 2010 09:36:17 -0700 Subject: Comment asml SNF 2010-04-07 08:43:22: ASML Quarterly PM Day2 Message-ID: From mahnaz at snf.stanford.edu Wed Apr 14 09:36:26 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 14 Apr 2010 09:36:26 -0700 Subject: Comment asml SNF 2010-04-06 08:12:24: ASML Quarterly PM Message-ID: From mahnaz at snf.stanford.edu Wed Apr 14 09:36:44 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 14 Apr 2010 09:36:44 -0700 Subject: Comment asml SNF 2010-03-30 06:18:46: starting 3inch demo Message-ID: From mahnaz at snf.stanford.edu Wed Apr 14 09:36:51 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 14 Apr 2010 09:36:51 -0700 Subject: Comment asml SNF 2010-03-30 16:31:58: 3 inch demo is completed Message-ID: From mahnaz at snf.stanford.edu Wed Apr 14 09:37:00 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 14 Apr 2010 09:37:00 -0700 Subject: Comment asml SNF 2010-04-01 07:53:29: ASML DEMO Message-ID: From mahnaz at snf.stanford.edu Wed Apr 14 09:37:07 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 14 Apr 2010 09:37:07 -0700 Subject: Comment asml SNF 2010-04-02 11:05:30: ASML Released Reservations 11:00-14:00 Message-ID: From mahnaz at snf.stanford.edu Wed Apr 14 09:37:30 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 14 Apr 2010 09:37:30 -0700 Subject: Comment asml SNF 2010-03-31 07:51:38: ASML DEMO 8:00-12:00 Message-ID: From kreifels at snf.stanford.edu Wed Apr 14 09:39:40 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Wed, 14 Apr 2010 09:39:40 -0700 Subject: Comment asml SNF 2010-04-14 09:39:39: hotspot detected, chuck is clean now Message-ID: During the daily PM a hot spot was detected at 6 oclock, clean the chuck and reran hotspot, chuck is clean now. From lindaohara at snf.stanford.edu Wed Apr 14 10:17:37 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 14 Apr 2010 10:17:37 -0700 Subject: Comment asml SNF 2010-04-14 10:17:36: ASML Released Reservations 10:30-13:00 Message-ID: From kreifels at snf.stanford.edu Thu Apr 15 08:56:53 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Thu, 15 Apr 2010 08:56:53 -0700 Subject: Comment asml SNF 2010-04-15 08:56:52: Lens inspection and relay work starting Message-ID: Lens inspection and extraction hood relay work starting From kreifels at snf.stanford.edu Thu Apr 15 12:04:58 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Thu, 15 Apr 2010 12:04:58 -0700 Subject: Comment asml SNF 2010-04-15 12:04:58: lens check and extraction hood relay completed Message-ID: Lens contamination check is completed, no inspection required due to no change in stray light or uniformity. Extraction hood relay install completed and tested. Returned system to Stanford From gsosa at snf.stanford.edu Fri Apr 16 10:03:33 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 16 Apr 2010 10:03:33 -0700 Subject: Comment asml SNF 2010-04-16 10:03:32: Hotspot 4/16 Message-ID: 2 Small hotspots on right side of major flat. Cleaned the e-chuck and retested. All OK. From lindaohara at snf.stanford.edu Tue Apr 20 10:14:30 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 20 Apr 2010 10:14:30 -0700 Subject: Comment asml SNF 2010-04-20 10:14:30: ASML Released Reservations to 12:00 Message-ID: From lindaohara at snf.stanford.edu Thu Apr 22 09:02:50 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 22 Apr 2010 09:02:50 -0700 Subject: Comment asml SNF 2010-04-22 09:02:49: Hotspot ck Message-ID: Found 2 hotspots at 7:00 o'clock position. Gary cleaned E-Chuck. Hotspot ck good, no hotspots From lindaohara at snf.stanford.edu Fri Apr 23 08:29:20 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 23 Apr 2010 08:29:20 -0700 Subject: Comment asml SNF 2010-04-23 08:29:19: Replace Lamp Message-ID: From kreifels at snf.stanford.edu Fri Apr 23 10:05:30 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Fri, 23 Apr 2010 10:05:30 -0700 Subject: Comment asml SNF 2010-04-23 10:05:29: Daily PM, Hot spot, lamp change. Message-ID: Completed the daily PM, was a hotspot at 6 oclock, clean the chuck and reran, hotspot is removed. Lamp change, lamp broke off at the tip, reinstall old lamp and ran uniformity. Returned system to Stanford. From lindaohara at snf.stanford.edu Fri Apr 23 10:06:55 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 23 Apr 2010 10:06:55 -0700 Subject: Comment asml SNF 2010-04-23 10:06:54: ASML Released Reservations 10:00-14:00 Message-ID: From rshyam at snf.stanford.edu Sat Apr 24 23:15:30 2010 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sat, 24 Apr 2010 23:15:30 -0700 Subject: Problem asml SNF 2010-04-24 23:15:29: mouse Message-ID: mouse is horrible, jumping randomly. From rshyam at snf.stanford.edu Sat Apr 24 23:44:58 2010 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sat, 24 Apr 2010 23:44:58 -0700 Subject: Problem asml SNF 2010-04-24 23:44:58: reticle unload Message-ID: system is not unloading reticles. says reticle handling driver status unknown. system is overall very sluggish. note: my reticle and somebody's else reticle are inside the system. From rostam at snf.stanford.edu Sun Apr 25 02:17:56 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Sun, 25 Apr 2010 02:17:56 -0700 Subject: Shutdown asml SNF 2010-04-25 02:17:56: Message-ID: From cmcg at snf.stanford.edu Sun Apr 25 18:45:10 2010 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Sun, 25 Apr 2010 18:45:10 -0700 Subject: Problem asml SNF 2010-04-25 18:45:10: other reticle is mine Message-ID: From gsosa at snf.stanford.edu Mon Apr 26 09:11:18 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 26 Apr 2010 09:11:18 -0700 Subject: Problem asml SNF 2010-04-24 23:15:29: mouse Message-ID: The mouse was extremely erratic. Also reticle handling problem- 2 reticles stranded in system. Reticle handling system unresponsive. Reset the RMS rack power. Reset tthe applications software. Reset all hardware. System unloaded reticles OK. Tested system by performing daily quals. Hotspot and E0 OK. Updated IQC focus because it was at -104nm. Mouse pointer is also working normally. System is OK and ready to use. From gsosa at snf.stanford.edu Mon Apr 26 09:11:24 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 26 Apr 2010 09:11:24 -0700 Subject: Shutdown asml SNF 2010-04-25 02:17:56: Message-ID: The mouse was extremely erratic. Also reticle handling problem- 2 reticles stranded in system. Reticle handling system unresponsive. Reset the RMS rack power. Reset tthe applications software. Reset all hardware. System unloaded reticles OK. Tested system by performing daily quals. Hotspot and E0 OK. Updated IQC focus because it was at -104nm. Mouse pointer is also working normally. System is OK and ready to use. From gsosa at snf.stanford.edu Mon Apr 26 09:13:34 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 26 Apr 2010 09:13:34 -0700 Subject: Problem asml SNF 2010-04-24 23:44:58: reticle unload Message-ID: The mouse was extremely erratic. Also reticle handling problem- 2 reticles stranded in system. Reticle handling system unresponsive. Reset the RMS rack power. Reset tthe applications software. Reset all hardware. System unloaded reticles OK. Tested system by performing daily quals. Hotspot and E0 OK. Updated IQC focus because it was at -104nm. Mouse pointer is also working normally. System is OK and ready to use. User reticles are unloaded and are back in their boxes. From gsosa at snf.stanford.edu Mon Apr 26 09:13:41 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 26 Apr 2010 09:13:41 -0700 Subject: Problem asml SNF 2010-04-25 18:45:10: other reticle is mine Message-ID: The mouse was extremely erratic. Also reticle handling problem- 2 reticles stranded in system. Reticle handling system unresponsive. Reset the RMS rack power. Reset tthe applications software. Reset all hardware. System unloaded reticles OK. Tested system by performing daily quals. Hotspot and E0 OK. Updated IQC focus because it was at -104nm. Mouse pointer is also working normally. System is OK and ready to use. User reticles are unloaded and are back in their boxes. From mahnaz at snf.stanford.edu Tue Apr 27 08:08:51 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 27 Apr 2010 08:08:51 -0700 Subject: Comment asml SNF 2010-04-23 10:06:54: ASML Released Reservations 10:00-14:00 Message-ID: From mahnaz at snf.stanford.edu Tue Apr 27 08:09:03 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 27 Apr 2010 08:09:03 -0700 Subject: Comment asml SNF 2010-04-23 08:29:19: Replace Lamp Message-ID: From ksaruta at snf.stanford.edu Tue Apr 27 15:30:29 2010 From: ksaruta at snf.stanford.edu (ksaruta at snf.stanford.edu) Date: Tue, 27 Apr 2010 15:30:29 -0700 Subject: Comment asml SNF 2010-04-27 15:30:29: released ASML to 17:00 Message-ID: From gsosa at snf.stanford.edu Wed Apr 28 13:36:03 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 28 Apr 2010 13:36:03 -0700 Subject: Comment asml SNF 2010-04-28 13:36:02: Backside Contamination Message-ID: Noticed a residue pattern on back of wafer when running polished side down. Isolated the residue as coming from the dipod load arm. Called FSE in to clean the system. FSE cleaned all critical surfaces in wafer path including the E-chuck. Contamination now gone. Hotspot test wafer OK. IQC test OK. System OK to use.