From gsosa at snf.stanford.edu Mon Aug 2 09:53:39 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 2 Aug 2010 09:53:39 -0700 Subject: Comment asml SNF 2010-08-02 09:53:38: Hotspot 8/2 Message-ID: Small hotspot at 3:00. Cleaned the E-Chuck with tooling. Re-test came out OK. From lindaohara at snf.stanford.edu Tue Aug 3 08:52:17 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 3 Aug 2010 08:52:17 -0700 Subject: Comment asml SNF 2010-08-03 08:52:17: Hotspot at 11 o'clock Message-ID: hotspot at 11 o'clock, going to clean E-chuck and re test From gsosa at snf.stanford.edu Tue Aug 3 10:16:02 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 3 Aug 2010 10:16:02 -0700 Subject: Comment asml SNF 2010-08-03 10:16:02: Hotspot 8/3 Message-ID: Hotspot again today near center of wafer. This is the 3rd day in a row. USERS... PLEASE INSPECT THE BACKS OF YOUR WAFERS AND ENSURE THAT THEY ARE CLEAN. THIS IS IMPORTANT, NOT ONLY FOR YOUR WORK BUT ALSO FOR OTHER USERS WORK AS WELL. From lindaohara at snf.stanford.edu Tue Aug 3 10:44:45 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 3 Aug 2010 10:44:45 -0700 Subject: Comment asml SNF 2010-08-03 10:44:44: ASML Released Reservations 11:00-13:00 Message-ID: From lindaohara at snf.stanford.edu Wed Aug 4 07:52:56 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 4 Aug 2010 07:52:56 -0700 Subject: Comment asml SNF 2010-08-04 07:52:55: ASML Day 1 MPM Started Message-ID: From stemori at snf.stanford.edu Wed Aug 4 08:50:05 2010 From: stemori at snf.stanford.edu (stemori at snf.stanford.edu) Date: Wed, 4 Aug 2010 08:50:05 -0700 Subject: Comment asml SNF 2010-08-04 08:50:05: Monthly PM Message-ID: Day 1 of the Monthly PM in progress From lindaohara at snf.stanford.edu Wed Aug 4 14:58:11 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 4 Aug 2010 14:58:11 -0700 Subject: Comment asml SNF 2010-08-04 14:58:10: ASML MPM Day 1 Completed Message-ID: From lindaohara at snf.stanford.edu Thu Aug 5 09:04:44 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 5 Aug 2010 09:04:44 -0700 Subject: Comment asml SNF 2010-08-05 09:04:42: Hotspot CK Message-ID: Hotspot found at 4 o'clock postion towards center. Saeed cleaned E-Chuck. recheck, no hotspots From lindaohara at snf.stanford.edu Thu Aug 5 09:05:05 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 5 Aug 2010 09:05:05 -0700 Subject: Comment asml SNF 2010-08-05 09:05:05: ASML MPM Day2 Started Message-ID: From lindaohara at snf.stanford.edu Thu Aug 5 15:04:28 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 5 Aug 2010 15:04:28 -0700 Subject: Comment asml SNF 2010-08-05 15:04:28: ASML MPM Day 2 Completed Message-ID: From lindaohara at snf.stanford.edu Fri Aug 6 10:39:22 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 6 Aug 2010 10:39:22 -0700 Subject: Comment asml SNF 2010-08-06 10:39:22: ASML Released Reservations 11:00-13:00 Message-ID: From calarrudo at snf.stanford.edu Sat Aug 7 13:13:22 2010 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Sat, 7 Aug 2010 13:13:22 -0700 Subject: Problem asml SNF 2010-08-07 13:13:21: Message-ID: i have an 88 micron shift in my pattern. i dont know how to fix this. From gsosa at snf.stanford.edu Mon Aug 9 08:54:34 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 9 Aug 2010 08:54:34 -0700 Subject: Comment asml SNF 2010-08-09 08:54:33: Hotspot 8/9 Message-ID: Hotspot on test wafer at 2:00. Cleaned the E-chuck with tooling and retested. Re-test came out good. From lindaohara at snf.stanford.edu Tue Aug 10 10:11:59 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 10 Aug 2010 10:11:59 -0700 Subject: Comment asml SNF 2010-08-10 10:11:58: ASML Released Reservations 10:30-12:30 Message-ID: From lindaohara at snf.stanford.edu Tue Aug 10 11:58:54 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 10 Aug 2010 11:58:54 -0700 Subject: Comment asml SNF 2010-08-10 11:58:53: ASML released Reservations 12:30-14:00 Message-ID: From nharjee at snf.stanford.edu Tue Aug 10 22:29:47 2010 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Tue, 10 Aug 2010 22:29:47 -0700 Subject: Problem asml SNF 2010-08-10 22:29:47: Floppy drive in bad state? Message-ID: Tried to mount 3 different floppy disks with normal "fdmount /mnt" and repeatedly received error that the floppy disk does not contain a file system, is write protected or is a tar floppy. All 3 floppies mount successfully on the emulator computer with the same command. Attempted to restore drive to a good state with "fdumount /mnt" and "eject -p floppy0" without success. Also tried the Connect/Disconnect buttons in Misc->File Utilities->Devices without success. From ahazeghi at snf.stanford.edu Wed Aug 11 00:18:01 2010 From: ahazeghi at snf.stanford.edu (ahazeghi at snf.stanford.edu) Date: Wed, 11 Aug 2010 00:18:01 -0700 Subject: Comment asml SNF 2010-08-11 00:18:00: latches for output cassette door broken Message-ID: latches for output chamber door are broken! From gsosa at snf.stanford.edu Wed Aug 11 09:04:24 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 11 Aug 2010 09:04:24 -0700 Subject: Problem asml SNF 2010-08-10 22:29:47: Floppy drive in bad state? Message-ID: ASM-L tech support rebooted the system and applications software and did a full hardware reset. floppy drive tested OK. From gsosa at snf.stanford.edu Wed Aug 11 09:05:05 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 11 Aug 2010 09:05:05 -0700 Subject: Comment asml SNF 2010-08-11 00:18:00: latches for output cassette door broken Message-ID: Replaced the 2 hinges on the output port cover. From gsosa at snf.stanford.edu Wed Aug 11 09:13:37 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 11 Aug 2010 09:13:37 -0700 Subject: Comment asml SNF 2010-08-11 09:13:37: 3 hotspots on test wafer Message-ID: There were 3 hotspots on this mornings hotspot test wafer( at 3 o'clock and 11 o'clock). Cleaned the E-chuck with factory tooling. Had to clean twice. There have been quite a few hotspots lately. Please inspect the backs of your wafers and take the necessary steps to ensure YOUR wafers are clean prior to going into ASML Stepper. YOU not only jeoporadize your work but the work of those who follow you. From lindaohara at snf.stanford.edu Wed Aug 11 09:38:04 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 11 Aug 2010 09:38:04 -0700 Subject: Comment asml SNF 2010-08-11 09:38:03: ASML Training Message-ID: From stemori at snf.stanford.edu Thu Aug 12 12:32:06 2010 From: stemori at snf.stanford.edu (stemori at snf.stanford.edu) Date: Thu, 12 Aug 2010 12:32:06 -0700 Subject: Comment asml SNF 2010-08-12 12:32:05: Lamp Change Message-ID: The Lamp change has been done. Verified Uniformity and Intensity. From stemori at snf.stanford.edu Thu Aug 12 12:39:29 2010 From: stemori at snf.stanford.edu (stemori at snf.stanford.edu) Date: Thu, 12 Aug 2010 12:39:29 -0700 Subject: Comment asml SNF 2010-08-12 12:39:27: microfabrication on the thin wafer Message-ID: From stemori at snf.stanford.edu Thu Aug 12 13:21:09 2010 From: stemori at snf.stanford.edu (stemori at snf.stanford.edu) Date: Thu, 12 Aug 2010 13:21:09 -0700 Subject: Comment asml SNF 2010-08-12 13:21:09: microfabrication project done Message-ID: microfabrication project done. From ericp at snf.stanford.edu Fri Aug 13 00:43:26 2010 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Fri, 13 Aug 2010 00:43:26 -0700 Subject: Shutdown asml SNF 2010-08-13 00:43:25: system thinks there's a lost wafer Message-ID: The system gave "system error" and then prompted to "clear batch". I clicked "ok" to that, and a red wafer appeared on the chuck (but there is no wafer there, at least not one that I put into the system, as all of my wafers are accounted for). It then said "FAST STARTUP may help" so I clicked "ok" to that, and then it says "contact a service engineer to find this wafer". Shutting down..... From mahnaz at snf.stanford.edu Fri Aug 13 07:20:02 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 13 Aug 2010 07:20:02 -0700 Subject: Comment asml SNF 2010-08-04 14:58:10: ASML MPM Day 1 Completed Message-ID: done From mahnaz at snf.stanford.edu Fri Aug 13 07:20:24 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 13 Aug 2010 07:20:24 -0700 Subject: Comment asml SNF 2010-08-05 09:04:42: Hotspot CK Message-ID: From mahnaz at snf.stanford.edu Fri Aug 13 07:20:44 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 13 Aug 2010 07:20:44 -0700 Subject: Comment asml SNF 2010-07-20 10:34:08: ASML Released Reservations 10:30-14:00 Message-ID: done From mahnaz at snf.stanford.edu Fri Aug 13 07:20:52 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 13 Aug 2010 07:20:52 -0700 Subject: Comment asml SNF 2010-07-22 08:52:02: ASML Released Reservations 9:00-11:00 Message-ID: From mahnaz at snf.stanford.edu Fri Aug 13 07:20:58 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 13 Aug 2010 07:20:58 -0700 Subject: Comment asml SNF 2010-07-22 10:29:28: ASML Released Reservations 11:00-14:00 Message-ID: From mahnaz at snf.stanford.edu Fri Aug 13 07:21:04 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 13 Aug 2010 07:21:04 -0700 Subject: Comment asml SNF 2010-07-23 09:02:49: ASML Released Reservations 9:00-14:00 Message-ID: From mahnaz at snf.stanford.edu Fri Aug 13 07:21:19 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 13 Aug 2010 07:21:19 -0700 Subject: Comment asml SNF 2010-07-29 08:37:43: ASML Released Reservations 9:00-11:00 Message-ID: From mahnaz at snf.stanford.edu Fri Aug 13 07:21:31 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 13 Aug 2010 07:21:31 -0700 Subject: Comment asml SNF 2010-07-29 11:16:03: ASML Released Reservations 11:00-13:00 Message-ID: From mahnaz at snf.stanford.edu Fri Aug 13 07:21:47 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 13 Aug 2010 07:21:47 -0700 Subject: Comment asml SNF 2010-08-03 10:44:44: ASML Released Reservations 11:00-13:00 Message-ID: From mahnaz at snf.stanford.edu Fri Aug 13 07:22:36 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 13 Aug 2010 07:22:36 -0700 Subject: Comment asml SNF 2010-08-06 10:39:22: ASML Released Reservations 11:00-13:00 Message-ID: From mahnaz at snf.stanford.edu Fri Aug 13 07:22:57 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 13 Aug 2010 07:22:57 -0700 Subject: Problem asml SNF 2010-08-07 13:13:21: Message-ID: From mahnaz at snf.stanford.edu Fri Aug 13 07:23:04 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 13 Aug 2010 07:23:04 -0700 Subject: Comment asml SNF 2010-08-10 10:11:58: ASML Released Reservations 10:30-12:30 Message-ID: From mahnaz at snf.stanford.edu Fri Aug 13 07:23:10 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 13 Aug 2010 07:23:10 -0700 Subject: Comment asml SNF 2010-08-10 11:58:53: ASML released Reservations 12:30-14:00 Message-ID: From mahnaz at snf.stanford.edu Fri Aug 13 07:23:19 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 13 Aug 2010 07:23:19 -0700 Subject: Comment asml SNF 2010-08-11 09:38:03: ASML Training Message-ID: From lindaohara at snf.stanford.edu Fri Aug 13 08:00:02 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 13 Aug 2010 08:00:02 -0700 Subject: Shutdown asml SNF 2010-08-13 00:43:25: system thinks there's a lost wafer Message-ID: Recovered System, no wafer in system. ok to use From lindaohara at snf.stanford.edu Fri Aug 13 09:05:00 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 13 Aug 2010 09:05:00 -0700 Subject: Comment asml SNF 2010-08-13 09:05:00: Hotspot Ck Message-ID: Hotspot at 4:00 o'clock position. ASML CSE is coming to clean chuck. From lindaohara at snf.stanford.edu Fri Aug 13 11:06:36 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 13 Aug 2010 11:06:36 -0700 Subject: Comment asml SNF 2010-08-13 11:06:36: Hotspot Clean Message-ID: ASML CSE Saeed is coming to SNF at 13:30 clean the E-Chuck. Then we'll retest for Hotspot Ck. From lindaohara at snf.stanford.edu Fri Aug 13 14:24:25 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 13 Aug 2010 14:24:25 -0700 Subject: Comment asml SNF 2010-08-13 14:24:25: Hotspot Check Message-ID: Saeed Cleaned E-Chuck, found no hotspots. okay to use From gsosa at snf.stanford.edu Mon Aug 16 09:57:08 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 16 Aug 2010 09:57:08 -0700 Subject: Comment asml SNF 2010-08-16 09:57:08: Hotspots 8/16 Message-ID: Three hotspots on test wafer- 10 Oclock, 4 Oclock and near middle. Cleaned the E-chuck with tooling and retested. Re-test came out good. From lindaohara at snf.stanford.edu Tue Aug 17 11:42:23 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 17 Aug 2010 11:42:23 -0700 Subject: Comment asml SNF 2010-08-17 11:42:22: ASML Released Reservations 12:00-14:00 Message-ID: From lindaohara at snf.stanford.edu Wed Aug 18 13:23:12 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 18 Aug 2010 13:23:12 -0700 Subject: Comment asml SNF 2010-08-18 13:23:11: ASML Released Reservations 13:30-14:00 Message-ID: From lindaohara at snf.stanford.edu Thu Aug 19 08:49:25 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 19 Aug 2010 08:49:25 -0700 Subject: Comment asml SNF 2010-08-19 08:49:25: ASML Released Reservations 9:00-10:00 Message-ID: From lindaohara at snf.stanford.edu Thu Aug 19 11:21:32 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 19 Aug 2010 11:21:32 -0700 Subject: Comment asml SNF 2010-08-19 11:21:31: ASML Released Reservations 11:30-14:00 Message-ID: From gsosa at snf.stanford.edu Fri Aug 20 06:53:19 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Aug 2010 06:53:19 -0700 Subject: Comment asml SNF 2010-07-30 09:57:46: Hotspot 7/30 Message-ID: To Archive From gsosa at snf.stanford.edu Fri Aug 20 06:53:24 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Aug 2010 06:53:24 -0700 Subject: Comment asml SNF 2010-08-02 09:53:38: Hotspot 8/2 Message-ID: To Archive From gsosa at snf.stanford.edu Fri Aug 20 06:53:30 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Aug 2010 06:53:30 -0700 Subject: Comment asml SNF 2010-08-03 08:52:17: Hotspot at 11 o'clock Message-ID: To Archive From gsosa at snf.stanford.edu Fri Aug 20 06:53:35 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Aug 2010 06:53:35 -0700 Subject: Comment asml SNF 2010-08-03 10:16:02: Hotspot 8/3 Message-ID: To Archive From gsosa at snf.stanford.edu Fri Aug 20 06:53:41 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Aug 2010 06:53:41 -0700 Subject: Comment asml SNF 2010-08-04 07:52:55: ASML Day 1 MPM Started Message-ID: To Archive From gsosa at snf.stanford.edu Fri Aug 20 06:53:46 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Aug 2010 06:53:46 -0700 Subject: Comment asml SNF 2010-08-04 08:50:05: Monthly PM Message-ID: To Archive From gsosa at snf.stanford.edu Fri Aug 20 06:54:17 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Aug 2010 06:54:17 -0700 Subject: Comment asml SNF 2010-08-05 09:05:05: ASML MPM Day2 Started Message-ID: To Archive From gsosa at snf.stanford.edu Fri Aug 20 06:54:26 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Aug 2010 06:54:26 -0700 Subject: Comment asml SNF 2010-08-05 15:04:28: ASML MPM Day 2 Completed Message-ID: To Archive From gsosa at snf.stanford.edu Fri Aug 20 06:54:39 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Aug 2010 06:54:39 -0700 Subject: Comment asml SNF 2010-08-12 12:32:05: Lamp Change Message-ID: To Archive From gsosa at snf.stanford.edu Fri Aug 20 06:54:44 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Aug 2010 06:54:44 -0700 Subject: Comment asml SNF 2010-08-12 12:39:27: microfabrication on the thin wafer Message-ID: To Archive From gsosa at snf.stanford.edu Fri Aug 20 06:54:50 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Aug 2010 06:54:50 -0700 Subject: Comment asml SNF 2010-08-12 13:21:09: microfabrication project done Message-ID: To Archive From gsosa at snf.stanford.edu Fri Aug 20 06:54:59 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Aug 2010 06:54:59 -0700 Subject: Comment asml SNF 2010-08-09 08:54:33: Hotspot 8/9 Message-ID: To Archive From gsosa at snf.stanford.edu Fri Aug 20 06:55:05 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Aug 2010 06:55:05 -0700 Subject: Comment asml SNF 2010-08-11 09:13:37: 3 hotspots on test wafer Message-ID: To Archive From gsosa at snf.stanford.edu Fri Aug 20 06:55:10 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Aug 2010 06:55:10 -0700 Subject: Comment asml SNF 2010-08-13 09:05:00: Hotspot Ck Message-ID: To Archive From gsosa at snf.stanford.edu Fri Aug 20 06:55:14 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Aug 2010 06:55:14 -0700 Subject: Comment asml SNF 2010-08-13 11:06:36: Hotspot Clean Message-ID: To Archive From gsosa at snf.stanford.edu Fri Aug 20 06:55:22 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Aug 2010 06:55:22 -0700 Subject: Comment asml SNF 2010-08-13 14:24:25: Hotspot Check Message-ID: To Archive From gsosa at snf.stanford.edu Fri Aug 20 06:55:27 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Aug 2010 06:55:27 -0700 Subject: Comment asml SNF 2010-08-16 09:57:08: Hotspots 8/16 Message-ID: To Archive From gsosa at snf.stanford.edu Fri Aug 20 09:03:45 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Aug 2010 09:03:45 -0700 Subject: Comment asml SNF 2010-08-20 09:03:44: Hotspot 8/20 Message-ID: Small hotspot at 11 O-Clock. Cleaned E-chuck with tooling. Retest OK. From lindaohara at snf.stanford.edu Fri Aug 20 09:39:02 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 20 Aug 2010 09:39:02 -0700 Subject: Comment asml SNF 2010-08-20 09:39:02: ASML Released Reservations 10:00-14:00 Message-ID: From gsosa at snf.stanford.edu Mon Aug 23 08:54:11 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 23 Aug 2010 08:54:11 -0700 Subject: Comment asml SNF 2010-08-23 08:54:10: Hotspots 8/23 Message-ID: 2 hotspots on qual wafer( at 3 and 8 O-Clock). Cleaned E-chuck with tooling. Shot 3 confirmation wafers. All 3 test wafers came out good. From ahazeghi at snf.stanford.edu Mon Aug 23 10:44:04 2010 From: ahazeghi at snf.stanford.edu (ahazeghi at snf.stanford.edu) Date: Mon, 23 Aug 2010 10:44:04 -0700 Subject: Problem asml SNF 2010-08-23 10:44:03: energy sensor Temp warning Message-ID: I got a warning msg during exposure energy sesnor temperature out of range. not sure why it poped. From lindaohara at snf.stanford.edu Tue Aug 24 09:26:54 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 24 Aug 2010 09:26:54 -0700 Subject: Comment asml SNF 2010-08-24 09:26:53: ASML Released Reservations 9:30-14:00 Message-ID: From lindaohara at snf.stanford.edu Wed Aug 25 08:38:41 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 25 Aug 2010 08:38:41 -0700 Subject: Comment asml SNF 2010-08-25 08:38:40: ASML Released Reservations until 10:00 Message-ID: From lindaohara at snf.stanford.edu Wed Aug 25 08:44:28 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 25 Aug 2010 08:44:28 -0700 Subject: Comment asml SNF 2010-08-25 08:44:27: ASML Released Reservations 9:00-14:00 Message-ID: From lindaohara at snf.stanford.edu Thu Aug 26 09:16:55 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 26 Aug 2010 09:16:55 -0700 Subject: Comment asml SNF 2010-08-26 09:16:54: ASML Released Reservations until 11:00 Message-ID: From lindaohara at snf.stanford.edu Thu Aug 26 13:21:55 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 26 Aug 2010 13:21:55 -0700 Subject: Comment asml SNF 2010-08-26 13:21:54: ASML Released Reservation until 14:00 Message-ID: From damodei at snf.stanford.edu Thu Aug 26 23:12:40 2010 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Thu, 26 Aug 2010 23:12:40 -0700 Subject: Problem asml SNF 2010-08-26 23:12:40: UNLOAD ERROR -- DO NOT USE Message-ID: My wafer exposed fine, but then encountered an error on unload -- "output casette empty" or "software error on unload" or something like that (check the log file). I tried to "abort batch and clear stepper" as requested by the pop-up menu, but this command did not execute either. The wafer is still on the E-chuck even though no exposure error occured -- the wafer is still green on the display. Repeat: This is NOT a problem with the wafer or the jobfile, something seems to have gone wrong with the software or the output casette when trying to unload. I am looking for someone knowledgeable enough to move the wafer in manual mode, until then DO NOT use the machine as there is a wafer inside. From gsosa at snf.stanford.edu Fri Aug 27 10:42:18 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 27 Aug 2010 10:42:18 -0700 Subject: Problem asml SNF 2010-08-26 23:12:40: UNLOAD ERROR -- DO NOT USE Message-ID: Recovered stranded waferfrom E-chuck and reset the system. From the information from the batch report and the error log, I suspect that the batch that was started was specified for 2 wafers even though there was only one wafer in the system. THe wafer handling system was looking for another wafer to load. Recreated this condition exactly but the system recovery worked fine. Do not know why wafer handling went into error. Performed daily quals. System OK t use. From gsosa at snf.stanford.edu Fri Aug 27 10:44:34 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 27 Aug 2010 10:44:34 -0700 Subject: Comment asml SNF 2010-08-27 10:44:33: Hotspot 8/27 Message-ID: Small hotspot at 3 O-Clock. Cleaned E-chuck with tooling. Re-test came out good. From lindaohara at snf.stanford.edu Fri Aug 27 10:46:29 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 27 Aug 2010 10:46:29 -0700 Subject: Comment asml SNF 2010-08-27 10:46:27: ASML Released Reservations 11:30-14:00 Message-ID: From lindaohara at snf.stanford.edu Tue Aug 31 09:58:43 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 31 Aug 2010 09:58:43 -0700 Subject: Comment asml SNF 2010-08-31 09:58:42: ASML Released Reservations 10:30-14:00 Message-ID: From cursive at snf.stanford.edu Tue Aug 31 22:23:48 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Tue, 31 Aug 2010 22:23:48 -0700 Subject: Problem asml SNF 2010-08-31 22:23:47: algnment shit about 200-300nm Message-ID: Please check the alignment. My wafers have 200-300nm shit.