Comment asml SNF 2010-08-03 10:16:02: Hotspot 8/3

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Aug 3 10:16:02 PDT 2010


Hotspot again today near center of wafer.  This is the 3rd day in a row. USERS... PLEASE INSPECT THE BACKS OF YOUR WAFERS AND ENSURE THAT THEY ARE CLEAN. THIS IS IMPORTANT, NOT ONLY FOR YOUR WORK BUT ALSO FOR OTHER USERS WORK AS WELL. 




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