Comment asml SNF 2010-08-05 09:04:42: Hotspot CK

lindaohara at snf.stanford.edu lindaohara at snf.stanford.edu
Thu Aug 5 09:04:44 PDT 2010

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Hotspot found at 4 o'clock postion towards center. Saeed cleaned E-Chuck. recheck, no hotspots

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