Comment asml SNF 2010-08-09 08:54:33: Hotspot 8/9

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Aug 9 08:54:34 PDT 2010

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Hotspot on test wafer at 2:00. Cleaned the E-chuck with tooling and retested. Re-test came out good.

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