Comment asml SNF 2010-08-11 09:13:37: 3 hotspots on test wafer

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Aug 11 09:13:37 PDT 2010


There were 3 hotspots on this mornings hotspot test wafer( at 3 o'clock and 11 o'clock). Cleaned the E-chuck with factory tooling. Had to clean twice. There have been quite a few hotspots lately. Please inspect the backs of your wafers and take the necessary steps to ensure YOUR wafers are clean prior to going into ASML Stepper. YOU not only jeoporadize your work but the work of those who follow you. 




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