Shutdown asml SNF 2010-08-13 00:43:25: system thinks there's a lost wafer

ericp at snf.stanford.edu ericp at snf.stanford.edu
Fri Aug 13 00:43:26 PDT 2010


The system gave "system error" and then prompted to "clear batch". 
I clicked "ok" to that, and a red wafer appeared on the chuck (but there is no wafer there, at least not one that I put into the system, as all of my wafers are accounted for).  It then said "FAST STARTUP may help" so I clicked "ok" to that, and then it says "contact a service engineer to find this wafer".  
Shutting down.....




More information about the asml-pcs mailing list