Comment asml SNF 2010-08-16 09:57:08: Hotspots 8/16

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Aug 16 09:57:08 PDT 2010


Three hotspots on test wafer- 10 Oclock, 4 Oclock and near middle. Cleaned the E-chuck with tooling and retested. Re-test came out good.




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