Comment asml SNF 2010-08-23 08:54:10: Hotspots 8/23

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Aug 23 08:54:11 PDT 2010

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2 hotspots on qual wafer( at 3  and 8 O-Clock). Cleaned E-chuck with tooling. Shot 3 confirmation wafers. All 3 test wafers came out good.

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