Problem asml SNF 2010-08-26 23:12:40: UNLOAD ERROR -- DO NOT USE

gsosa at gsosa at
Fri Aug 27 10:42:18 PDT 2010

Recovered stranded waferfrom E-chuck and reset the system. From the information from the batch report and the error log, I suspect that  the batch that was started was specified for 2 wafers even though there was only one wafer in the system. THe wafer handling system was looking for another wafer to load. Recreated this condition exactly but the system recovery worked fine. Do not know why wafer handling went into error. Performed daily quals. System OK t use.

More information about the asml-pcs mailing list