From lindaohara at snf.stanford.edu Wed Dec 1 11:18:11 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 1 Dec 2010 11:18:11 -0800 Subject: Comment asml SNF 2010-12-01 11:18:10: ASML Released Reservations 11:30-14:00 Message-ID: From gsosa at snf.stanford.edu Wed Dec 1 11:40:42 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 1 Dec 2010 11:40:42 -0800 Subject: Comment asml SNF 2010-12-01 11:40:41: Hotspot 12/1 Message-ID: 1 hotspot on test wafer at 3 OClock. Cleaned EChuck with tooling and retested. Re-test OK. From lindaohara at snf.stanford.edu Fri Dec 3 11:48:42 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 3 Dec 2010 11:48:42 -0800 Subject: Comment asml SNF 2010-12-03 11:48:41: ASML Released Reservations 12:30-14:00 Message-ID: From lindaohara at snf.stanford.edu Wed Dec 8 08:57:04 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 8 Dec 2010 08:57:04 -0800 Subject: Problem asml SNF 2010-12-08 08:57:04: Hotspot Message-ID: Found 2 hotspots during Hotspot ck. ASML CSE Saeed is coming in to clean E-Chuck. From lindaohara at snf.stanford.edu Wed Dec 8 11:01:36 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 8 Dec 2010 11:01:36 -0800 Subject: Problem asml SNF 2010-12-08 08:57:04: Hotspot Message-ID: Saeed cleaned E-Chuck and retest hotspot, no hotspots. From lindaohara at snf.stanford.edu Wed Dec 8 11:02:24 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 8 Dec 2010 11:02:24 -0800 Subject: Comment asml SNF 2010-12-08 11:02:24: ASML Released Reservations 11:00-14:00 Message-ID: From lindaohara at snf.stanford.edu Thu Dec 9 08:55:02 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 9 Dec 2010 08:55:02 -0800 Subject: Problem asml SNF 2010-12-09 08:55:02: HOTSPOT Message-ID: hotspots at 2 o'clock position 4 upper right quadrant and 1 at 6 o'clock. Saeed is coming in to clean E-Chuck. PLEASE CHECK THE BACK OF YOUR WAFERS BEFORE PUTTING THE WAFERS IN THE ASML. THANK YOU. Linda O. From stemori at snf.stanford.edu Thu Dec 9 10:56:12 2010 From: stemori at snf.stanford.edu (stemori at snf.stanford.edu) Date: Thu, 9 Dec 2010 10:56:12 -0800 Subject: Problem asml SNF 2010-12-09 08:55:02: HOTSPOT Message-ID: Cleaned the E-chuck, retested Hot Spot check, no Hot Spot. From lindaohara at snf.stanford.edu Thu Dec 9 10:58:50 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 9 Dec 2010 10:58:50 -0800 Subject: Comment asml SNF 2010-12-09 10:58:50: ASML Released Reservations 11:00-14:00 Message-ID: From lindaohara at snf.stanford.edu Fri Dec 10 11:00:02 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 10 Dec 2010 11:00:02 -0800 Subject: Shutdown asml SNF 2010-12-10 11:00:01: Wafer Stage Won't Initialize Message-ID: From gsosa at snf.stanford.edu Fri Dec 10 17:32:43 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 10 Dec 2010 17:32:43 -0800 Subject: Comment asml SNF 2010-12-10 17:32:42: Stepper Still Down 12/10 Message-ID: The stepper has a wafer stage initialization problem. Vendors are continuing to troubleshoot the system. Chris Ringwelski will return tonight with additional parts and tooling to continue troubleshooting. If not resolved tonight, they may return over the weekend to resolve issue. Please check back in Coral for tool status and updates. From gsosa at snf.stanford.edu Fri Dec 10 20:05:07 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 10 Dec 2010 20:05:07 -0800 Subject: Shutdown asml SNF 2010-12-10 11:00:01: Wafer Stage Won't Initialize Message-ID: The stepper is back up. Vendor troubleshot X/Y stage sub-system. After unplugging and reseating the position bus controller PCB, the X/Y stage started functioning normally. Vendor ran many performance and repro tests to confirm operation. IQC, Uniformity and hotspot tests OK. System ready for use. If there are any problems with the tool, please report them in Coral. From gsosa at snf.stanford.edu Fri Dec 10 20:05:14 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 10 Dec 2010 20:05:14 -0800 Subject: Comment asml SNF 2010-12-10 17:32:42: Stepper Still Down 12/10 Message-ID: The stepper is back up. Vendor troubleshot X/Y stage sub-system. After unplugging and reseating the position bus controller PCB, the X/Y stage started functioning normally. Vendor ran many performance and repro tests to confirm operation. IQC, Uniformity and hotspot tests OK. System ready for use. If there are any problems with the tool, please report them in Coral. From gsosa at snf.stanford.edu Fri Dec 10 20:05:44 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 10 Dec 2010 20:05:44 -0800 Subject: Comment asml SNF 2010-12-10 20:05:43: Stepper is up 12/10 Message-ID: The stepper is back up. Vendor troubleshot X/Y stage sub-system. After unplugging and reseating the position bus controller PCB, the X/Y stage started functioning normally. Vendor ran many performance and repro tests to confirm operation. IQC, Uniformity and hotspot tests OK. System ready for use. If there are any problems with the tool, please report them in Coral. From lindaohara at snf.stanford.edu Mon Dec 13 09:00:53 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Mon, 13 Dec 2010 09:00:53 -0800 Subject: Comment asml SNF 2010-12-13 09:00:53: 8" ASML Demo Message-ID: Starting 8" ASML DEMO From lindaohara at snf.stanford.edu Tue Dec 14 16:53:03 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 14 Dec 2010 16:53:03 -0800 Subject: Comment asml SNF 2010-12-14 16:53:02: ASML up for 4" on January 5th 2011 Message-ID: Due to Demo going into Wednesday Dec 15th, the ASML will not be up for 4 inch until January 5rh 2011. Sorry for the inconvenience, Linda Ohara ASML From lindaohara at snf.stanford.edu Wed Dec 15 11:20:27 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 15 Dec 2010 11:20:27 -0800 Subject: Shutdown asml SNF 2010-12-15 11:20:26: ASML Annual PM in Progress Message-ID: