Problem asml SNF 2010-12-09 08:55:02: HOTSPOT

lindaohara at snf.stanford.edu lindaohara at snf.stanford.edu
Thu Dec 9 08:55:02 PST 2010

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hotspots at 2 o'clock position  4 upper right quadrant and 1 at 6 o'clock. Saeed is coming in to clean E-Chuck. PLEASE CHECK THE BACK OF YOUR WAFERS BEFORE PUTTING THE WAFERS IN THE ASML. THANK YOU.
Linda O.

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