Comment asml SNF 2010-12-10 17:32:42: Stepper Still Down 12/10

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Dec 10 17:32:43 PST 2010


The stepper has a wafer stage initialization problem. Vendors are continuing to troubleshoot the system. Chris Ringwelski will return tonight with additional parts and tooling to continue troubleshooting. If not resolved tonight, they may return over the weekend to resolve issue. Please check back in Coral for tool status and updates.




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