Shutdown asml SNF 2010-12-10 11:00:01: Wafer Stage Won't Initialize

gsosa at gsosa at
Fri Dec 10 20:05:07 PST 2010

The stepper is back up. Vendor troubleshot X/Y stage sub-system.  After unplugging and reseating the position bus controller PCB, the X/Y stage started functioning normally. Vendor ran many performance and repro tests to confirm operation. IQC, Uniformity and hotspot  tests OK. System ready for use.  If there are any problems with the tool,  please report them in Coral.

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