Comment asml SNF 2010-12-10 20:05:43: Stepper is up 12/10

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Dec 10 20:05:44 PST 2010


The stepper is back up. Vendor troubleshot X/Y stage sub-system.  After unplugging and reseating the position bus controller PCB, the X/Y stage started functioning normally. Vendor ran many performance and repro tests to confirm operation. IQC, Uniformity and hotspot  tests OK. System ready for use.  If there are any problems with the tool,  please report them in Coral.




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