From gsosa at snf.stanford.edu Mon Feb 1 09:49:51 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 1 Feb 2010 09:49:51 -0800 Subject: Comment asml SNF 2010-02-01 09:49:51: Hotspot 2/1/2010 Message-ID: Small hotspot at 3-Oclock position. Cleaned the Echuck. Retest OK. From gyama at snf.stanford.edu Mon Feb 1 11:22:22 2010 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Mon, 1 Feb 2010 11:22:22 -0800 Subject: Problem asml SNF 2010-02-01 11:22:22: vac alarm, but running fine Message-ID: From gsosa at snf.stanford.edu Mon Feb 1 11:36:31 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 1 Feb 2010 11:36:31 -0800 Subject: Problem asml SNF 2010-02-01 11:22:22: vac alarm, but running fine Message-ID: Wrong machine. Should be SVG coat 1 From lindaohara at snf.stanford.edu Tue Feb 2 09:38:00 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 2 Feb 2010 09:38:00 -0800 Subject: Comment asml SNF 2010-02-02 09:37:59: ASML DEMO 10:30 through 14:00 Message-ID: From lindaohara at snf.stanford.edu Tue Feb 2 13:35:30 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 2 Feb 2010 13:35:30 -0800 Subject: Comment asml SNF 2010-02-02 13:35:30: ASML free until 14:00 Message-ID: From lindaohara at snf.stanford.edu Wed Feb 3 12:43:29 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 3 Feb 2010 12:43:29 -0800 Subject: Comment asml SNF 2010-02-03 12:43:29: ASML Released Reservations 12:30-14:00 Message-ID: From yeh at snf.stanford.edu Wed Feb 3 13:14:41 2010 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Wed, 3 Feb 2010 13:14:41 -0800 Subject: Problem asml SNF 2010-02-03 13:14:40: not able to exit program Message-ID: batch control program will not exit. also, was not able to process batch. machine does not recognize carriers were properly seated. tried re-seating carriers to no effect. From gsosa at snf.stanford.edu Wed Feb 3 14:03:38 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 3 Feb 2010 14:03:38 -0800 Subject: Problem asml SNF 2010-02-03 13:14:40: not able to exit program Message-ID: Rebooted the operating software. Checked wafer loading. Made small adjustment to right cassette positioning tab on input port. From lindaohara at snf.stanford.edu Thu Feb 4 09:50:33 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 4 Feb 2010 09:50:33 -0800 Subject: Comment asml SNF 2010-02-04 09:50:33: ASML Released Reservations 10-00-13:00 Message-ID: From lindaohara at snf.stanford.edu Fri Feb 5 09:01:20 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 5 Feb 2010 09:01:20 -0800 Subject: Comment asml SNF 2010-02-05 09:01:19: ASML Working on Purge Hood Message-ID: From kreifels at snf.stanford.edu Fri Feb 5 13:46:29 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Fri, 5 Feb 2010 13:46:29 -0800 Subject: Comment asml SNF 2010-02-05 13:46:28: extraction hood testing completed Message-ID: Installed the extraction hood, system fully initialized, and image test to check position of hood, all looks good, hood was removed for later setup. From mahnaz at snf.stanford.edu Fri Feb 5 16:03:21 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 5 Feb 2010 16:03:21 -0800 Subject: Comment asml SNF 2010-02-05 16:03:20: Critical work Message-ID: System is up but needs to be stabilize till 5 pm today . I already ran it no problem Critical work should wait till then. From lindaohara at snf.stanford.edu Tue Feb 9 08:47:20 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 9 Feb 2010 08:47:20 -0800 Subject: Comment asml SNF 2010-02-09 08:47:20: ASML Monthly PM Message-ID: From kreifels at snf.stanford.edu Tue Feb 9 14:24:26 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Tue, 9 Feb 2010 14:24:26 -0800 Subject: Comment asml SNF 2010-02-09 14:24:26: Monthly PM status Message-ID: Monlty PM is not completed, will completed tomorrow or thursday. System is up for production. From kreifels at snf.stanford.edu Wed Feb 10 09:00:11 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Wed, 10 Feb 2010 09:00:11 -0800 Subject: Comment asml SNF 2010-02-10 09:00:09: contine the MPM Message-ID: From kreifels at snf.stanford.edu Wed Feb 10 12:51:46 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Wed, 10 Feb 2010 12:51:46 -0800 Subject: Comment asml SNF 2010-02-10 12:51:46: Monthly PM status Message-ID: Completed the Monthly PM, all data in spec. From kreifels at snf.stanford.edu Wed Feb 10 12:53:02 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Wed, 10 Feb 2010 12:53:02 -0800 Subject: Comment asml SNF 2010-02-10 12:53:02: Backside align cals Message-ID: Will perform the backside align cals tomorrow. From gsosa at snf.stanford.edu Thu Feb 11 07:41:41 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Feb 2010 07:41:41 -0800 Subject: Comment asml SNF 2010-01-05 15:59:23: Up Message-ID: To Archive From gsosa at snf.stanford.edu Thu Feb 11 07:41:50 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Feb 2010 07:41:50 -0800 Subject: Comment asml SNF 2010-01-14 12:57:49: ASML Free 13:00-1400 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Feb 11 07:41:57 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Feb 2010 07:41:57 -0800 Subject: Comment asml SNF 2010-01-15 14:14:16: ASML OK to use Message-ID: To Archive From gsosa at snf.stanford.edu Thu Feb 11 07:42:03 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Feb 2010 07:42:03 -0800 Subject: Comment asml SNF 2010-01-20 14:05:35: Okay to use Message-ID: To Archive From gsosa at snf.stanford.edu Thu Feb 11 07:42:16 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Feb 2010 07:42:16 -0800 Subject: Comment asml SNF 2009-11-22 13:45:32: Granite table dirty? adding particles? Message-ID: To Archive From gsosa at snf.stanford.edu Thu Feb 11 07:42:22 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Feb 2010 07:42:22 -0800 Subject: Comment asml SNF 2010-01-08 09:47:13: hot spot Message-ID: To Archive From gsosa at snf.stanford.edu Thu Feb 11 07:42:44 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Feb 2010 07:42:44 -0800 Subject: Comment asml SNF 2010-01-21 09:42:55: ASML 6" DEMO Message-ID: To Archive From gsosa at snf.stanford.edu Thu Feb 11 07:42:49 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Feb 2010 07:42:49 -0800 Subject: Comment asml SNF 2010-01-21 16:39:46: system status Message-ID: To Archive From gsosa at snf.stanford.edu Thu Feb 11 07:42:55 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Feb 2010 07:42:55 -0800 Subject: Comment asml SNF 2010-01-22 10:27:32: Hotspot Chk Ok Message-ID: To Archive From gsosa at snf.stanford.edu Thu Feb 11 07:43:06 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Feb 2010 07:43:06 -0800 Subject: Comment asml SNF 2010-02-02 09:37:59: ASML DEMO 10:30 through 14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Feb 11 07:43:11 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Feb 2010 07:43:11 -0800 Subject: Comment asml SNF 2010-02-02 13:35:30: ASML free until 14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Feb 11 07:43:16 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Feb 2010 07:43:16 -0800 Subject: Comment asml SNF 2010-02-03 12:43:29: ASML Released Reservations 12:30-14:00 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Feb 11 07:43:21 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Feb 2010 07:43:21 -0800 Subject: Comment asml SNF 2010-02-04 09:50:33: ASML Released Reservations 10-00-13:00 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Feb 11 07:43:26 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Feb 2010 07:43:26 -0800 Subject: Comment asml SNF 2010-02-05 09:01:19: ASML Working on Purge Hood Message-ID: To Archive From gsosa at snf.stanford.edu Thu Feb 11 07:44:02 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Feb 2010 07:44:02 -0800 Subject: Comment asml SNF 2010-01-15 10:32:53: ASML Purge Hood Work Message-ID: To Archive From gsosa at snf.stanford.edu Thu Feb 11 07:44:09 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Feb 2010 07:44:09 -0800 Subject: Comment asml SNF 2010-01-15 12:09:21: ASML Purge Hood Work done Message-ID: To Archive From gsosa at snf.stanford.edu Thu Feb 11 07:44:17 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Feb 2010 07:44:17 -0800 Subject: Comment asml SNF 2010-01-20 09:52:20: system status Message-ID: To Archive From gsosa at snf.stanford.edu Thu Feb 11 07:44:49 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Feb 2010 07:44:49 -0800 Subject: Comment asml SNF 2010-01-28 08:55:53: Hotspot Message-ID: To Archive From gsosa at snf.stanford.edu Thu Feb 11 07:44:55 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Feb 2010 07:44:55 -0800 Subject: Comment asml SNF 2010-01-29 09:24:26: ASML FSE Work Message-ID: To Archive From gsosa at snf.stanford.edu Thu Feb 11 07:45:03 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Feb 2010 07:45:03 -0800 Subject: Comment asml SNF 2010-02-01 09:49:51: Hotspot 2/1/2010 Message-ID: To Archive From gsosa at snf.stanford.edu Thu Feb 11 07:45:11 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Feb 2010 07:45:11 -0800 Subject: Comment asml SNF 2010-02-05 16:03:20: Critical work Message-ID: To Archive From gsosa at snf.stanford.edu Thu Feb 11 07:45:24 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Feb 2010 07:45:24 -0800 Subject: Comment asml SNF 2010-01-26 07:25:58: emulator Message-ID: To Archive From gsosa at snf.stanford.edu Thu Feb 11 07:45:29 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Feb 2010 07:45:29 -0800 Subject: Comment asml SNF 2010-01-27 11:12:54: SAWS Status Message-ID: To Archive From lindaohara at snf.stanford.edu Thu Feb 11 09:48:05 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 11 Feb 2010 09:48:05 -0800 Subject: Comment asml SNF 2010-02-11 09:48:04: Hotspot Chk Message-ID: Found Hotspot at 11 o'clock position. Gary cleaned the E-Chuck. Hotspot still there. Gary cleaned the E-Chuck. Hotspot check ok From lindaohara at snf.stanford.edu Thu Feb 11 10:46:56 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 11 Feb 2010 10:46:56 -0800 Subject: Comment asml SNF 2010-02-11 10:46:56: BSA Done Message-ID: 3D Backside Alignment Repro done, in spec From kreifels at snf.stanford.edu Fri Feb 12 09:15:51 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Fri, 12 Feb 2010 09:15:51 -0800 Subject: Comment asml SNF 2010-02-12 09:15:50: Daily PM Completed Message-ID: Performed the daily PM, Ran Uniformity = .84 Ran IQC, 3SDT focal = 18 all other data is valid. Ran Hotspot, found a hotspot at 1 oclock, clean the chuck, and ran a verification, chuck is clean. From gsosa at snf.stanford.edu Fri Feb 12 09:20:53 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 12 Feb 2010 09:20:53 -0800 Subject: Comment asml SNF 2010-02-12 09:20:53: Tool released by ASM-L Message-ID: Tool released by ASML. System ready to use. From ericp at snf.stanford.edu Sun Feb 14 00:05:09 2010 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sun, 14 Feb 2010 00:05:09 -0800 Subject: Problem asml SNF 2010-02-14 00:05:08: error on input carrier (4) Message-ID: refuses to take wafers. Prev user had same issue, but was able to make it go after several tries. From ericp at snf.stanford.edu Sun Feb 14 17:12:25 2010 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sun, 14 Feb 2010 17:12:25 -0800 Subject: Comment asml SNF 2010-02-14 17:12:25: regarding yesterday's problem.... Message-ID: It seems to be better. Maybe it was related to the temp being out of whack in litho (??) From kreifels at snf.stanford.edu Mon Feb 15 09:18:27 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Mon, 15 Feb 2010 09:18:27 -0800 Subject: Comment asml SNF 2010-02-15 09:18:26: system check Message-ID: Will perform a system check for temp stabilization. From kreifels at snf.stanford.edu Mon Feb 15 09:51:13 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Mon, 15 Feb 2010 09:51:13 -0800 Subject: Comment asml SNF 2010-02-15 09:51:12: System verification Message-ID: Check the CT log, system is stabilized. Ran the daily test queue all data is in spec. Uniformity = .84 IQC STD focal = 5.42 Ran a hotspot wafer, chuck is clean. Returning system to Stanford. From lindaohara at snf.stanford.edu Tue Feb 16 09:00:06 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 16 Feb 2010 09:00:06 -0800 Subject: Problem asml SNF 2010-02-14 00:05:08: error on input carrier (4) Message-ID: system okay From lindaohara at snf.stanford.edu Tue Feb 16 09:56:10 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 16 Feb 2010 09:56:10 -0800 Subject: Comment asml SNF 2010-02-16 09:56:09: ASML Released Reservations 10:00-14:00 Message-ID: Finished Daily & Weekly Quals, all in spec. Released Tool Reservations From lindaohara at snf.stanford.edu Wed Feb 17 09:25:00 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 17 Feb 2010 09:25:00 -0800 Subject: Comment asml SNF 2010-02-17 09:24:59: ASML Extraction Hood Project Message-ID: From lindaohara at snf.stanford.edu Wed Feb 17 11:20:52 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 17 Feb 2010 11:20:52 -0800 Subject: Comment asml SNF 2010-02-17 11:20:51: Hotspot ck ok Message-ID: Found 3 hotspots at 1'oclock, 2o'clock, & 3 o'clock, cleaned E-Chuck, 1 hotspot at 10 o'clock, cleaned E-Chuck, hotspot ck ok, no hotspots From lindaohara at snf.stanford.edu Wed Feb 17 11:23:08 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 17 Feb 2010 11:23:08 -0800 Subject: Comment asml SNF 2010-02-17 11:23:08: ASML Released Reservations 11:30-14:00 Message-ID: From kreifels at snf.stanford.edu Thu Feb 18 08:28:16 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Thu, 18 Feb 2010 08:28:16 -0800 Subject: Comment asml SNF 2010-02-18 08:28:15: daily PM Message-ID: Starting the daily PM From kreifels at snf.stanford.edu Thu Feb 18 09:41:39 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Thu, 18 Feb 2010 09:41:39 -0800 Subject: Comment asml SNF 2010-02-18 09:41:39: hotspot check is OK Message-ID: During the daily PM, found a hotspot at 12 o'clock position, cleaned the chuck and ran a verification wafer, chuck is clean From lindaohara at snf.stanford.edu Thu Feb 18 09:43:32 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 18 Feb 2010 09:43:32 -0800 Subject: Comment asml SNF 2010-02-18 09:43:31: ASML Released Reservations 10:00-14:00 Message-ID: From kreifels at snf.stanford.edu Fri Feb 19 09:12:49 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Fri, 19 Feb 2010 09:12:49 -0800 Subject: Comment asml SNF 2010-02-19 09:12:48: Hotspot removed, system OK Message-ID: Found a hotspot at 7 o'clock, clean the chuck and ran a verification wafer, chuck is clean. From lindaohara at snf.stanford.edu Fri Feb 19 09:20:09 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 19 Feb 2010 09:20:09 -0800 Subject: Comment asml SNF 2010-02-19 09:20:08: ASML Released Reservations 9:30-13:00 Message-ID: From kreifels at snf.stanford.edu Fri Feb 19 11:02:53 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Fri, 19 Feb 2010 11:02:53 -0800 Subject: Comment asml SNF 2010-02-19 11:02:53: SAWS patch level is now 42C Message-ID: Installed the patch 42C on the SAWS, all ok From lindaohara at snf.stanford.edu Tue Feb 23 08:42:55 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 23 Feb 2010 08:42:55 -0800 Subject: Comment asml SNF 2010-02-23 08:42:55: Purge Hood Installation Message-ID: From lindaohara at snf.stanford.edu Tue Feb 23 15:11:54 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 23 Feb 2010 15:11:54 -0800 Subject: Comment asml SNF 2010-02-23 15:11:54: Hotspot CK-PlS CHECK BACK OF YOUR WAFERS Message-ID: Found Hotspot at 5'oclock position. Mark cleaned the E-Chuck. Hotspot ok. Please check the back of your wafers before processing your wafers through ASML. We would appreciate it if you follow procedure. Thank you, ASML From kreifels at snf.stanford.edu Tue Feb 23 15:25:27 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Tue, 23 Feb 2010 15:25:27 -0800 Subject: Comment asml SNF 2010-02-23 15:25:26: extraction hood update Message-ID: The extraction hood is installed and working, the metro setup is completed and all data is in spec. returning the system to stanford. Note: due to time constraints we still need to install the pump monitoring system. this does not effect the performance of the system. From damodei at snf.stanford.edu Tue Feb 23 18:35:48 2010 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Tue, 23 Feb 2010 18:35:48 -0800 Subject: Comment asml SNF 2010-02-23 18:35:47: Spin rinse dryer not fully drying Message-ID: I (and some other users) have noticed that the SRD seems to be leaving small droplets of water on the back of wafers, which could be another source of ASML chuck contamination. Have the drying times or speeds recently been changed? From lindaohara at snf.stanford.edu Wed Feb 24 10:23:56 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 24 Feb 2010 10:23:56 -0800 Subject: Comment asml SNF 2010-02-24 10:23:56: ASML Released Reservations 10:30-14-00 Message-ID: From lindaohara at snf.stanford.edu Thu Feb 25 07:46:38 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 25 Feb 2010 07:46:38 -0800 Subject: Comment asml SNF 2010-02-25 07:46:38: ASML 3" DEMO Message-ID: From kreifels at snf.stanford.edu Thu Feb 25 18:56:52 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Thu, 25 Feb 2010 18:56:52 -0800 Subject: Comment asml SNF 2010-02-25 18:56:52: 4 inch conversion status Message-ID: Completed the conversion and handed the system to Stanford From kreifels at snf.stanford.edu Fri Feb 26 11:04:39 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Fri, 26 Feb 2010 11:04:39 -0800 Subject: Comment asml SNF 2010-02-26 11:04:38: HotSpot on chuck removed Message-ID: During the daily PM, a hotspot was detected at the 4 oclock position, clean the spot and ran a verification, chuck is clean. From lindaohara at snf.stanford.edu Fri Feb 26 11:53:15 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 26 Feb 2010 11:53:15 -0800 Subject: Comment asml SNF 2010-02-26 11:53:15: ASML Released Reservations 12:00 - 14:00 Message-ID: