Problem asml SNF 2010-02-03 13:14:40: not able to exit program

yeh at snf.stanford.edu yeh at snf.stanford.edu
Wed Feb 3 13:14:41 PST 2010

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batch control program will not exit.
also, was not able to process batch.  machine does not recognize carriers were properly seated.  tried re-seating carriers to no effect.

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