Comment asml SNF 2010-02-11 09:48:04: Hotspot Chk

lindaohara at snf.stanford.edu lindaohara at snf.stanford.edu
Thu Feb 11 09:48:05 PST 2010


Found Hotspot at 11 o'clock position. Gary cleaned the E-Chuck. Hotspot still there. Gary cleaned the E-Chuck. Hotspot check ok 




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