Comment asml SNF 2010-02-12 09:15:50: Daily PM Completed

kreifels at snf.stanford.edu kreifels at snf.stanford.edu
Fri Feb 12 09:15:51 PST 2010


Performed the daily PM,
Ran Uniformity = .84
Ran IQC, 3SDT focal = 18 all other data is valid.
Ran Hotspot, found a hotspot at 1 oclock, clean the chuck, and ran a verification, chuck is clean.




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