Comment asml SNF 2010-02-15 09:51:12: System verification

kreifels at snf.stanford.edu kreifels at snf.stanford.edu
Mon Feb 15 09:51:13 PST 2010


Check the CT log, system is stabilized.
Ran the daily test queue all data is in spec.
Uniformity = .84 
IQC STD focal = 5.42
Ran a hotspot wafer, chuck is clean.
Returning system to Stanford.




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