Comment asml SNF 2010-02-17 11:20:51: Hotspot ck ok

lindaohara at snf.stanford.edu lindaohara at snf.stanford.edu
Wed Feb 17 11:20:52 PST 2010


Found 3 hotspots at 1'oclock, 2o'clock, & 3 o'clock, cleaned E-Chuck, 1 hotspot at 10 o'clock, cleaned E-Chuck, hotspot ck ok, no hotspots 




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