Comment asml SNF 2010-02-23 15:11:54: Hotspot CK-PlS CHECK BACK OF YOUR WAFERS

[lindaohara at snf.stanford.edu]

Found Hotspot at 5'oclock position. Mark cleaned the E-Chuck. Hotspot ok. Please check  the back of your wafers before processing your wafers through ASML.  We would appreciate it  if you follow procedure. 
Thank you,
ASML