Comment asml SNF 2010-02-23 15:25:26: extraction hood update

kreifels at kreifels at
Tue Feb 23 15:25:27 PST 2010

The extraction hood is installed and working, the metro setup is completed and all data is in spec. returning the system to stanford. 
Note: due to time constraints we still need to install the pump monitoring system. this does not effect the performance of the system.

More information about the asml-pcs mailing list