Comment asml SNF 2010-02-23 18:35:47: Spin rinse dryer not fully drying

damodei at snf.stanford.edu damodei at snf.stanford.edu
Tue Feb 23 18:35:48 PST 2010


I (and some other users) have noticed that the SRD seems to be leaving small droplets of water on the back of wafers, which could be another source of ASML chuck contamination.  Have the drying times or speeds recently been changed?




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