Comment asml SNF 2010-02-26 11:04:38: HotSpot on chuck removed

kreifels at snf.stanford.edu kreifels at snf.stanford.edu
Fri Feb 26 11:04:39 PST 2010


During the daily PM, a hotspot was detected at the 4 oclock position, clean the spot and ran a verification, chuck is clean.




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