Comment asml SNF 2010-01-16 09:57:39: Temp & Humidity Control

mtang at mtang at
Sat Jan 16 09:57:40 PST 2010

Dear ASML users --
As you know, we are losing temperature and humidity control in the lab this weekend.  The outside humidity will likely be on the high side, with temperatures on the low side especially in late evenings/early mornings.  Consulting with the ASML maintenance engineers, they believe the system should still be able to run within spec under these conditions, as long as the ASML environmental control system can handle the changes.  They feel there is a possibility that if the temperature change is too fast, the environmental control system (TCU) may require additional time to re-stabilize.  If this happens, the machine will stop processing.
What to do:
1.  Whatever happens, DO NOT PERFORM A HARD RESET.  There is a good possibility of seriously damaging the tool in this state.
2.  If you get a yellow warning:  The system needs time to restabilize. Once it does, the system will reset and the yellow warning will clear.  At this time, it is alright to begin processing again.
3.  If you get a red warning:  the system will not run.  DO NOT continue using the system and DO NOT reinitialize.  Put the system down on Coral.  Staff will check Coral status through the weekend.  ASML will be on-site on Monday morning and there will be also some technical support during the days this weekend.

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