Shutdown asml SNF 2010-01-20 07:45:33: Lost lens pressure
lindaohara at snf.stanford.edu
lindaohara at snf.stanford.edu
Wed Jan 20 14:03:12 PST 2010
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Shutdown asml SNF 2010-01-20 07:45:33: Lost lens pressure
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Comment asml SNF 2010-01-20 09:52:20: system status
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UP, Okay to use
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Shutdown asml SNF 2010-01-20 07:45:33: Lost lens pressure
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Comment asml SNF 2010-01-20 09:52:20: system status
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