Problem asml SNF 2010-01-20 14:15:03: SYSTEM STABILIZING

kreifels at snf.stanford.edu kreifels at snf.stanford.edu
Wed Jan 20 14:15:03 PST 2010


Due to the system loosing lens gas last night we are still stabilizing and focus looks good, but could still be drifting. Non-critical good to go, Critical layers need to run a test wafer first.




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