Shutdown asml SNF 2010-01-22 11:05:00: Wafer lost in system
lindaohara at snf.stanford.edu
lindaohara at snf.stanford.edu
Fri Jan 22 11:05:00 PST 2010
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Comment asml SNF 2010-01-22 10:27:32: Hotspot Chk Ok
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Shutdown asml SNF 2010-01-22 11:05:00: Wafer lost in system
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3D Cal wafer lost in system
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Comment asml SNF 2010-01-22 10:27:32: Hotspot Chk Ok
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Shutdown asml SNF 2010-01-22 11:05:00: Wafer lost in system
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