Shutdown asml SNF 2010-01-22 11:05:00: Wafer lost in system

lindaohara at snf.stanford.edu lindaohara at snf.stanford.edu
Fri Jan 22 12:00:17 PST 2010


Wafer wasn't in system. it was in port 3. Adj port 3 cassette. Did full startup. Up and RTP. 




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