From lindaohara at snf.stanford.edu Thu Jul 1 07:47:43 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 1 Jul 2010 07:47:43 -0700 Subject: Comment asml SNF 2010-07-01 07:47:42: ASML QPM Day 2 Message-ID: From lindaohara at snf.stanford.edu Thu Jul 1 08:50:37 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 1 Jul 2010 08:50:37 -0700 Subject: Comment asml SNF 2010-07-01 08:50:37: Hotspot check Message-ID: Found hotspot at 10:00 o'clock position. Warlitio cleaned E-Chuck. Hotspot check ok, no hotspots. From lindaohara at snf.stanford.edu Thu Jul 1 15:00:33 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 1 Jul 2010 15:00:33 -0700 Subject: Comment asml SNF 2010-07-01 15:00:32: ASML QPM Day 2 Completed Message-ID: ASML Released Reservations 15:00 -16:00 From lindaohara at snf.stanford.edu Wed Jul 7 12:33:24 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 7 Jul 2010 12:33:24 -0700 Subject: Comment asml SNF 2010-07-07 12:33:24: ASML Released Reservations 12:30-14:00 Message-ID: From gth at snf.stanford.edu Fri Jul 9 00:55:06 2010 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Fri, 9 Jul 2010 00:55:06 -0700 Subject: Problem asml SNF 2010-07-09 00:55:05: problems ! Message-ID: tried 1 layer with alignment - did not work tried 0 layer - does not work did a fast start up did not work did a full start up did not work please check. From gsosa at snf.stanford.edu Fri Jul 9 07:30:56 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 9 Jul 2010 07:30:56 -0700 Subject: Shutdown asml SNF 2010-07-09 07:30:56: Leveling Issues Message-ID: The system is having leveling issues. From gsosa at snf.stanford.edu Fri Jul 9 08:24:01 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 9 Jul 2010 08:24:01 -0700 Subject: Shutdown asml SNF 2010-07-09 07:30:56: Leveling Issues Message-ID: The logging report indicated leveling problems. Also had problems with users wafers this morning. Did a complete system shutdown. Reloaded applications software and re-initialized all hardware subsystems. Tested system with standard daily quals- All OK. Hotspot and E/0- OK. System is OK to use. From king at snf.stanford.edu Fri Jul 9 09:22:24 2010 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 9 Jul 2010 09:22:24 -0700 Subject: Comment asml SNF 2010-07-09 09:22:23: Failed for me too Message-ID: Gary looked at it too. Field service will be here today. From king at snf.stanford.edu Fri Jul 9 09:23:08 2010 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 9 Jul 2010 09:23:08 -0700 Subject: Shutdown asml SNF 2010-07-09 09:23:08: shutdown Message-ID: ..in case anyone was planning to use it. From gsosa at snf.stanford.edu Fri Jul 9 09:33:37 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 9 Jul 2010 09:33:37 -0700 Subject: Comment asml SNF 2010-07-09 09:22:23: Failed for me too Message-ID: The logging report indicated leveling problems. Also had problems with users wafers this morning. Did a complete system shutdown. Reloaded applications software and re-initialized all hardware subsystems. Tested system with standard daily quals- All OK. Hotspot and E/0- OK. System is OK to use. From gsosa at snf.stanford.edu Fri Jul 9 09:33:48 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 9 Jul 2010 09:33:48 -0700 Subject: Shutdown asml SNF 2010-07-09 09:23:08: shutdown Message-ID: The logging report indicated leveling problems. Also had problems with users wafers this morning. Did a complete system shutdown. Reloaded applications software and re-initialized all hardware subsystems. Tested system with standard daily quals- All OK. Hotspot and E/0- OK. System is OK to use. From gsosa at snf.stanford.edu Fri Jul 9 09:34:00 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 9 Jul 2010 09:34:00 -0700 Subject: Problem asml SNF 2010-07-09 00:55:05: problems ! Message-ID: The logging report indicated leveling problems. Also had problems with users wafers this morning. Did a complete system shutdown. Reloaded applications software and re-initialized all hardware subsystems. Tested system with standard daily quals- All OK. Hotspot and E/0- OK. System is OK to use. From lindaohara at snf.stanford.edu Fri Jul 9 13:09:18 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 9 Jul 2010 13:09:18 -0700 Subject: Comment asml SNF 2010-07-09 13:09:17: ASML Lamp Change Message-ID: From lindaohara at snf.stanford.edu Fri Jul 9 14:32:09 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 9 Jul 2010 14:32:09 -0700 Subject: Comment asml SNF 2010-07-09 14:32:08: ASML Lamp Change done Message-ID: okay to use, up From lindaohara at snf.stanford.edu Wed Jul 14 09:00:10 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 14 Jul 2010 09:00:10 -0700 Subject: Problem asml SNF 2010-07-14 09:00:10: Hotspot Message-ID: Hotspot 7:00 o'clock position. Called ASML CSE to come and clean the E-Chuck From joho at snf.stanford.edu Wed Jul 14 13:59:40 2010 From: joho at snf.stanford.edu (joho at snf.stanford.edu) Date: Wed, 14 Jul 2010 13:59:40 -0700 Subject: Comment asml SNF 2010-07-14 13:59:39: Hotspot Message-ID: Completed hot spot clean. Verified with hotspot qual wafer. Starting 3DAlign PM From lindaohara at snf.stanford.edu Wed Jul 14 14:32:11 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 14 Jul 2010 14:32:11 -0700 Subject: Problem asml SNF 2010-07-14 09:00:10: Hotspot Message-ID: Cleaned E-Chuck Hotspot ck ok From lindaohara at snf.stanford.edu Wed Jul 14 14:33:06 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 14 Jul 2010 14:33:06 -0700 Subject: Problem asml SNF 2010-06-26 07:44:40: Warning Message-ID: ok From lindaohara at snf.stanford.edu Thu Jul 15 09:35:31 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 15 Jul 2010 09:35:31 -0700 Subject: Comment asml SNF 2010-07-15 09:35:30: ASML Released Reservations until 11:00a Message-ID: From lindaohara at snf.stanford.edu Thu Jul 15 13:03:13 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 15 Jul 2010 13:03:13 -0700 Subject: Comment asml SNF 2010-07-15 13:03:12: ASML Released reservations until 14:00 Message-ID: From lindaohara at snf.stanford.edu Fri Jul 16 12:55:01 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 16 Jul 2010 12:55:01 -0700 Subject: Comment asml SNF 2010-07-16 12:55:00: ASML Released Reservations until 14:00 Message-ID: From lindaohara at snf.stanford.edu Tue Jul 20 10:34:09 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Tue, 20 Jul 2010 10:34:09 -0700 Subject: Comment asml SNF 2010-07-20 10:34:08: ASML Released Reservations 10:30-14:00 Message-ID: From lindaohara at snf.stanford.edu Thu Jul 22 08:52:02 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 22 Jul 2010 08:52:02 -0700 Subject: Comment asml SNF 2010-07-22 08:52:02: ASML Released Reservations 9:00-11:00 Message-ID: From lindaohara at snf.stanford.edu Thu Jul 22 10:29:28 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 22 Jul 2010 10:29:28 -0700 Subject: Comment asml SNF 2010-07-22 10:29:28: ASML Released Reservations 11:00-14:00 Message-ID: From gsosa at snf.stanford.edu Fri Jul 23 06:55:43 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 23 Jul 2010 06:55:43 -0700 Subject: Comment asml SNF 2010-06-25 09:54:12: Hotspot Ck Message-ID: To Archives From gsosa at snf.stanford.edu Fri Jul 23 06:55:52 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 23 Jul 2010 06:55:52 -0700 Subject: Comment asml SNF 2010-06-25 09:54:53: ASML Released Reservations 10:00-14:00 Message-ID: To Archives From gsosa at snf.stanford.edu Fri Jul 23 06:55:57 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 23 Jul 2010 06:55:57 -0700 Subject: Comment asml SNF 2010-06-29 08:55:55: ASML Demo Message-ID: To Archives From gsosa at snf.stanford.edu Fri Jul 23 06:56:07 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 23 Jul 2010 06:56:07 -0700 Subject: Comment asml SNF 2010-06-29 13:20:27: ASML Released until 14:00 Message-ID: To Archives From gsosa at snf.stanford.edu Fri Jul 23 06:56:13 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 23 Jul 2010 06:56:13 -0700 Subject: Comment asml SNF 2010-06-30 08:30:22: Day 1 Quarterly PM Message-ID: To Archives From gsosa at snf.stanford.edu Fri Jul 23 06:56:18 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 23 Jul 2010 06:56:18 -0700 Subject: Comment asml SNF 2010-06-30 15:02:52: Hotspot Check Message-ID: To Archives From gsosa at snf.stanford.edu Fri Jul 23 06:56:24 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 23 Jul 2010 06:56:24 -0700 Subject: Comment asml SNF 2010-06-30 15:04:46: ASML Day 1 QPM Completed Message-ID: To Archives From gsosa at snf.stanford.edu Fri Jul 23 06:56:31 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 23 Jul 2010 06:56:31 -0700 Subject: Comment asml SNF 2010-07-01 07:47:42: ASML QPM Day 2 Message-ID: To Archives From gsosa at snf.stanford.edu Fri Jul 23 06:56:36 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 23 Jul 2010 06:56:36 -0700 Subject: Comment asml SNF 2010-07-01 08:50:37: Hotspot check Message-ID: To Archives From gsosa at snf.stanford.edu Fri Jul 23 06:56:43 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 23 Jul 2010 06:56:43 -0700 Subject: Comment asml SNF 2010-07-01 15:00:32: ASML QPM Day 2 Completed Message-ID: To Archives From gsosa at snf.stanford.edu Fri Jul 23 06:56:48 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 23 Jul 2010 06:56:48 -0700 Subject: Comment asml SNF 2010-07-07 12:33:24: ASML Released Reservations 12:30-14:00 Message-ID: To Archives From gsosa at snf.stanford.edu Fri Jul 23 06:56:53 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 23 Jul 2010 06:56:53 -0700 Subject: Comment asml SNF 2010-07-09 13:09:17: ASML Lamp Change Message-ID: To Archives From gsosa at snf.stanford.edu Fri Jul 23 06:56:58 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 23 Jul 2010 06:56:58 -0700 Subject: Comment asml SNF 2010-07-09 14:32:08: ASML Lamp Change done Message-ID: To Archives From gsosa at snf.stanford.edu Fri Jul 23 06:57:06 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 23 Jul 2010 06:57:06 -0700 Subject: Comment asml SNF 2010-07-14 13:59:39: Hotspot Message-ID: To Archives From gsosa at snf.stanford.edu Fri Jul 23 06:57:15 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 23 Jul 2010 06:57:15 -0700 Subject: Comment asml SNF 2010-07-15 09:35:30: ASML Released Reservations until 11:00a Message-ID: To Archives From gsosa at snf.stanford.edu Fri Jul 23 06:57:19 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 23 Jul 2010 06:57:19 -0700 Subject: Comment asml SNF 2010-07-15 13:03:12: ASML Released reservations until 14:00 Message-ID: To Archives From gsosa at snf.stanford.edu Fri Jul 23 06:57:26 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 23 Jul 2010 06:57:26 -0700 Subject: Comment asml SNF 2010-07-16 12:55:00: ASML Released Reservations until 14:00 Message-ID: To Archives From lindaohara at snf.stanford.edu Fri Jul 23 09:02:49 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 23 Jul 2010 09:02:49 -0700 Subject: Comment asml SNF 2010-07-23 09:02:49: ASML Released Reservations 9:00-14:00 Message-ID: From lindaohara at snf.stanford.edu Thu Jul 29 08:37:44 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 29 Jul 2010 08:37:44 -0700 Subject: Comment asml SNF 2010-07-29 08:37:43: ASML Released Reservations 9:00-11:00 Message-ID: From lindaohara at snf.stanford.edu Thu Jul 29 11:16:07 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 29 Jul 2010 11:16:07 -0700 Subject: Comment asml SNF 2010-07-29 11:16:03: ASML Released Reservations 11:00-13:00 Message-ID: From gsosa at snf.stanford.edu Fri Jul 30 09:57:46 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 30 Jul 2010 09:57:46 -0700 Subject: Comment asml SNF 2010-07-30 09:57:46: Hotspot 7/30 Message-ID: Small hotspot at 1:00 position. Cleaned the E-chuck surface and retested. Still same. Cleaned E-chuck one more time. Retest came out good.