Comment asml SNF 2010-07-01 08:50:37: Hotspot check

lindaohara at snf.stanford.edu lindaohara at snf.stanford.edu
Thu Jul 1 08:50:37 PDT 2010


Found hotspot at 10:00 o'clock position. Warlitio cleaned E-Chuck. Hotspot check ok, no hotspots.




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