Shutdown asml SNF 2010-07-09 07:30:56: Leveling Issues

gsosa at gsosa at
Fri Jul 9 08:24:01 PDT 2010

The logging report indicated leveling problems. Also had problems with users wafers this morning. Did a complete system shutdown. Reloaded applications software and re-initialized all hardware subsystems. Tested system with standard daily quals- All OK. Hotspot and E/0- OK. System is OK to use. 

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