Shutdown asml SNF 2010-07-09 09:23:08: shutdown

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Jul 9 09:33:48 PDT 2010


The logging report indicated leveling problems. Also had problems with users wafers this morning. Did a complete system shutdown. Reloaded applications software and re-initialized all hardware subsystems. Tested system with standard daily quals- All OK. Hotspot and E/0- OK. System is OK to use. 




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