Comment asml SNF 2010-07-30 09:57:46: Hotspot 7/30

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Jul 30 09:57:46 PDT 2010


Small hotspot at 1:00 position. Cleaned the E-chuck surface and retested.  Still same. Cleaned E-chuck one more time. Retest came out good.




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