Problem asml SNF 2010-05-28 00:13:05: SMIF loader error

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Jun 9 06:55:52 PDT 2010


ASML FSE's replaced another library top ring assembly. The 1st one they installed was bad. All reticle library functions and reticle loading tested- All OK. Performed daily quals- All OK. System is ready to use.




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