Problem asml SNF 2010-06-09 13:21:19: Litho SRD leaving droplets

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Jun 9 15:23:30 PDT 2010


Checked and found 2nd dry cycle time set to Zero. Set to 200 seconds and also labeled the digi-switch selector for dry cycle 2. Tested operation. Wafers and boat came out dry.




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