From kreifels at snf.stanford.edu Tue Mar 2 06:14:44 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:14:44 -0800 Subject: Comment asml SNF 2010-03-02 06:14:43: starting 3inch conversion Message-ID: From gsosa at snf.stanford.edu Tue Mar 2 06:49:16 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:49:16 -0800 Subject: Comment asml SNF 2010-01-16 09:57:39: Temp & Humidity Control Message-ID: To Archives From gsosa at snf.stanford.edu Tue Mar 2 06:49:21 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:49:21 -0800 Subject: Comment asml SNF 2010-01-29 13:00:35: gradient filter status Message-ID: To Archives From gsosa at snf.stanford.edu Tue Mar 2 06:49:27 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:49:27 -0800 Subject: Comment asml SNF 2010-02-05 13:46:28: extraction hood testing completed Message-ID: To Archives From gsosa at snf.stanford.edu Tue Mar 2 06:49:34 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:49:34 -0800 Subject: Comment asml SNF 2010-02-09 08:47:20: ASML Monthly PM Message-ID: To Archives From gsosa at snf.stanford.edu Tue Mar 2 06:49:39 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:49:39 -0800 Subject: Comment asml SNF 2010-02-09 14:24:26: Monthly PM status Message-ID: To Archives From gsosa at snf.stanford.edu Tue Mar 2 06:49:44 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:49:44 -0800 Subject: Comment asml SNF 2010-02-10 09:00:09: contine the MPM Message-ID: To Archives From gsosa at snf.stanford.edu Tue Mar 2 06:49:50 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:49:50 -0800 Subject: Comment asml SNF 2010-02-10 12:51:46: Monthly PM status Message-ID: To Archives From gsosa at snf.stanford.edu Tue Mar 2 06:49:58 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:49:58 -0800 Subject: Comment asml SNF 2010-02-10 12:53:02: Backside align cals Message-ID: To Archives From gsosa at snf.stanford.edu Tue Mar 2 06:50:04 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:50:04 -0800 Subject: Comment asml SNF 2010-02-11 09:48:04: Hotspot Chk Message-ID: To Archives From gsosa at snf.stanford.edu Tue Mar 2 06:50:22 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:50:22 -0800 Subject: Comment asml SNF 2010-02-11 10:46:56: BSA Done Message-ID: To Archives From gsosa at snf.stanford.edu Tue Mar 2 06:50:28 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:50:28 -0800 Subject: Comment asml SNF 2010-02-12 09:15:50: Daily PM Completed Message-ID: To Archives From gsosa at snf.stanford.edu Tue Mar 2 06:50:34 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:50:34 -0800 Subject: Comment asml SNF 2010-02-12 09:20:53: Tool released by ASM-L Message-ID: To Archives From gsosa at snf.stanford.edu Tue Mar 2 06:50:41 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:50:41 -0800 Subject: Comment asml SNF 2010-02-14 17:12:25: regarding yesterday's problem.... Message-ID: To Archives From gsosa at snf.stanford.edu Tue Mar 2 06:50:47 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:50:47 -0800 Subject: Comment asml SNF 2010-02-15 09:18:26: system check Message-ID: To Archives From gsosa at snf.stanford.edu Tue Mar 2 06:50:52 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:50:52 -0800 Subject: Comment asml SNF 2010-02-15 09:51:12: System verification Message-ID: To Archives From gsosa at snf.stanford.edu Tue Mar 2 06:50:59 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:50:59 -0800 Subject: Comment asml SNF 2010-02-16 09:56:09: ASML Released Reservations 10:00-14:00 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Mar 2 06:51:03 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:51:03 -0800 Subject: Comment asml SNF 2010-02-17 09:24:59: ASML Extraction Hood Project Message-ID: To Archives From gsosa at snf.stanford.edu Tue Mar 2 06:51:09 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:51:09 -0800 Subject: Comment asml SNF 2010-02-17 11:20:51: Hotspot ck ok Message-ID: To Archives From gsosa at snf.stanford.edu Tue Mar 2 06:51:14 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:51:14 -0800 Subject: Comment asml SNF 2010-02-17 11:23:08: ASML Released Reservations 11:30-14:00 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Mar 2 06:51:20 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:51:20 -0800 Subject: Comment asml SNF 2010-02-18 08:28:15: daily PM Message-ID: To Archives From gsosa at snf.stanford.edu Tue Mar 2 06:51:25 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:51:25 -0800 Subject: Comment asml SNF 2010-02-18 09:41:39: hotspot check is OK Message-ID: To Archives From gsosa at snf.stanford.edu Tue Mar 2 06:51:31 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:51:31 -0800 Subject: Comment asml SNF 2010-02-18 09:43:31: ASML Released Reservations 10:00-14:00 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Mar 2 06:51:36 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:51:36 -0800 Subject: Comment asml SNF 2010-02-19 09:12:48: Hotspot removed, system OK Message-ID: To Archives From gsosa at snf.stanford.edu Tue Mar 2 06:51:42 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:51:42 -0800 Subject: Comment asml SNF 2010-02-19 09:20:08: ASML Released Reservations 9:30-13:00 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Mar 2 06:52:36 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:52:36 -0800 Subject: Comment asml SNF 2010-02-19 11:02:53: SAWS patch level is now 42C Message-ID: To Archives From gsosa at snf.stanford.edu Tue Mar 2 06:52:54 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:52:54 -0800 Subject: Comment asml SNF 2010-02-24 10:23:56: ASML Released Reservations 10:30-14-00 Message-ID: To Archives From gsosa at snf.stanford.edu Tue Mar 2 06:53:05 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Mar 2010 06:53:05 -0800 Subject: Comment asml SNF 2010-02-26 11:53:15: ASML Released Reservations 12:00 - 14:00 Message-ID: To Archives From kreifels at snf.stanford.edu Tue Mar 2 17:36:05 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Tue, 2 Mar 2010 17:36:05 -0800 Subject: Comment asml SNF 2010-03-02 17:36:04: Tool back to Stanford Message-ID: Completed the Lumileds project and all calibrations, returned system to Stanford. From kreifels at snf.stanford.edu Wed Mar 3 09:20:41 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Wed, 3 Mar 2010 09:20:41 -0800 Subject: Comment asml SNF 2010-03-03 09:20:41: daily PM completed Message-ID: Daily PM completed, all items in spec, found a small hotspot at the 11 oclock position, clean the chuck and verified, chuck is clean. From gsosa at snf.stanford.edu Wed Mar 3 12:51:33 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 3 Mar 2010 12:51:33 -0800 Subject: Comment asml SNF 2010-03-03 12:51:32: Reservations released Message-ID: ASML reservations released. Tool now available to users From kreifels at snf.stanford.edu Thu Mar 4 07:32:36 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Thu, 4 Mar 2010 07:32:36 -0800 Subject: Comment asml SNF 2010-03-04 07:32:35: Perform daily PM Message-ID: From lindaohara at snf.stanford.edu Fri Mar 5 08:26:18 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 5 Mar 2010 08:26:18 -0800 Subject: Comment asml SNF 2010-03-05 08:26:18: ASML Training Class 8:30-11:30 Message-ID: From lindaohara at snf.stanford.edu Fri Mar 5 12:07:42 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 5 Mar 2010 12:07:42 -0800 Subject: Comment asml SNF 2010-03-05 12:07:42: ASML Released Reservations 12:00-14:00 Message-ID: From mahnaz at snf.stanford.edu Tue Mar 9 10:26:27 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 9 Mar 2010 10:26:27 -0800 Subject: Comment asml SNF 2010-03-05 08:26:18: ASML Training Class 8:30-11:30 Message-ID: done From mahnaz at snf.stanford.edu Tue Mar 9 10:26:35 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 9 Mar 2010 10:26:35 -0800 Subject: Comment asml SNF 2010-03-05 12:07:42: ASML Released Reservations 12:00-14:00 Message-ID: From mahnaz at snf.stanford.edu Tue Mar 9 10:26:46 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 9 Mar 2010 10:26:46 -0800 Subject: Comment asml SNF 2010-03-03 12:51:32: Reservations released Message-ID: From mahnaz at snf.stanford.edu Tue Mar 9 10:26:53 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 9 Mar 2010 10:26:53 -0800 Subject: Comment asml SNF 2010-03-02 17:36:04: Tool back to Stanford Message-ID: From kreifels at snf.stanford.edu Tue Mar 9 13:30:17 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Tue, 9 Mar 2010 13:30:17 -0800 Subject: Comment asml SNF 2010-03-09 13:30:17: monthly pm completed Message-ID: Completed the monthly PM all data in spec. Tomorrow will perform the disk to disk backup. Note:the disk to disk is not a Monthly PM item. From lindaohara at snf.stanford.edu Wed Mar 10 11:57:31 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 10 Mar 2010 11:57:31 -0800 Subject: Comment asml SNF 2010-03-10 11:57:31: ASML Free 12:00-13:00 Message-ID: From lindaohara at snf.stanford.edu Thu Mar 11 07:57:38 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 11 Mar 2010 07:57:38 -0800 Subject: Comment asml SNF 2010-03-11 07:57:37: ASML 3" DEMO Message-ID: From lindaohara at snf.stanford.edu Thu Mar 11 16:34:57 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 11 Mar 2010 16:34:57 -0800 Subject: Comment asml SNF 2010-03-11 16:34:56: ASML 4" UP Message-ID: ASML Quals in spec and up for 4" From lindaohara at snf.stanford.edu Thu Mar 11 16:36:01 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 11 Mar 2010 16:36:01 -0800 Subject: Comment asml SNF 2010-03-11 16:36:01: ASML Released Reservations 16:30-20:00 Message-ID: From gsosa at snf.stanford.edu Fri Mar 12 10:15:17 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 12 Mar 2010 10:15:17 -0800 Subject: Comment asml SNF 2010-03-12 10:15:16: Hotspot 03/11 Message-ID: Small hotspot on test wafer near major flat. Cleaned the E-chuck and retested- All OK. From kreifels at snf.stanford.edu Tue Mar 16 11:34:40 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Tue, 16 Mar 2010 11:34:40 -0700 Subject: Comment asml SNF 2010-03-16 11:34:39: daily PM and new backup script Message-ID: The daily PM is completed and all data is in spec. and a new MC backup script is installed and tested. Note: the script allows you to grab MC's at any time, so you do not have to exit a test to backup MC's. From kreifels at snf.stanford.edu Tue Mar 16 11:35:47 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Tue, 16 Mar 2010 11:35:47 -0700 Subject: Comment asml SNF 2010-03-16 11:35:46: system released Message-ID: the system is released to Stanford. From kreifels at snf.stanford.edu Wed Mar 17 13:13:47 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Wed, 17 Mar 2010 13:13:47 -0700 Subject: Comment asml SNF 2010-03-17 13:13:47: Released ASML Message-ID: I have released the ASML tool. From kreifels at snf.stanford.edu Thu Mar 18 17:01:56 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Thu, 18 Mar 2010 17:01:56 -0700 Subject: Comment asml SNF 2010-03-18 17:01:56: 3 inch demo completed Message-ID: 3 inch demo is completed, tool is converted back to 4 inch, all calibrations are completed. currently running unif and iqc, then tool will be released to stanford. From kreifels at snf.stanford.edu Thu Mar 18 17:13:21 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Thu, 18 Mar 2010 17:13:21 -0700 Subject: Comment asml SNF 2010-03-18 17:13:20: released system to Stanford Message-ID: system is released to stanford. From kreifels at snf.stanford.edu Fri Mar 19 08:32:06 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Fri, 19 Mar 2010 08:32:06 -0700 Subject: Comment asml SNF 2010-03-19 08:32:05: daily PM and Lamp change Message-ID: From kreifels at snf.stanford.edu Fri Mar 19 10:30:51 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Fri, 19 Mar 2010 10:30:51 -0700 Subject: Comment asml SNF 2010-03-19 10:30:51: tool status Message-ID: lamp is change and optimized and daily pm is completed and logged. From king at snf.stanford.edu Fri Mar 19 16:28:21 2010 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 19 Mar 2010 16:28:21 -0700 Subject: Comment asml SNF 2010-03-19 16:28:20: Dedicated SRD cassette Message-ID: A suggestion to consider dedicating a cleaner teflon cassette for the litho SRD, to be used before going into the ASML tool. Tthe random litho cassettes frequently have lots of PR particles (as you'd expect, not a complaint). Thanks. From rik at snf.stanford.edu Sun Mar 21 22:55:45 2010 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Sun, 21 Mar 2010 22:55:45 -0700 Subject: Problem asml SNF 2010-03-21 22:55:44: Software hung in Batch Definition Message-ID: Ran my wafer through. When the system returned to the "Batch Definition" screen from the "Batch run" screen, it stopped responding. There was a "invalid callback: 44" message in the log. Not sure if it pertains to the issue. Was able to unload the reticles. From kreifels at snf.stanford.edu Mon Mar 22 09:20:25 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Mon, 22 Mar 2010 09:20:25 -0700 Subject: Comment asml SNF 2010-03-22 09:20:24: Lockup is cleared Message-ID: was reported a lockup last night, software was restarted and lockup was cleared. Finished the daily PM and logged all data in the logbook. Returned system to Stanford. From gsosa at snf.stanford.edu Mon Mar 22 14:36:12 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Mar 2010 14:36:12 -0700 Subject: Problem asml SNF 2010-03-21 22:55:44: Software hung in Batch Definition Message-ID: Reset the application software. Did full startup. Did daily quals- All OK. From kreifels at snf.stanford.edu Tue Mar 23 13:33:06 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Tue, 23 Mar 2010 13:33:06 -0700 Subject: Comment asml SNF 2010-03-23 13:33:05: extraction hood status Message-ID: started to install the relay for the extraction hood and found a conflict between the diagram and actual pin location on a connector. Will escalate to 3rd line for clarification. system is returned to Stanford. From lindaohara at snf.stanford.edu Wed Mar 24 11:10:16 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 24 Mar 2010 11:10:16 -0700 Subject: Comment asml SNF 2010-03-24 11:10:15: ASML Released Reservations 11:00-14:00 Message-ID: From damodei at snf.stanford.edu Wed Mar 24 22:45:28 2010 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Wed, 24 Mar 2010 22:45:28 -0700 Subject: Problem asml SNF 2010-03-24 22:45:27: SRD leaving water on wafers Message-ID: The SRD is leaving drops of water on the wafers again. This is a likely cause of contamination and should be addressed. From kreifels at snf.stanford.edu Thu Mar 25 06:14:07 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Thu, 25 Mar 2010 06:14:07 -0700 Subject: Comment asml SNF 2010-03-25 06:14:06: Starting 3 inch demo Message-ID: From kreifels at snf.stanford.edu Thu Mar 25 15:16:25 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Thu, 25 Mar 2010 15:16:25 -0700 Subject: Comment asml SNF 2010-03-25 15:16:24: 3 inch demo is complete Message-ID: Completed the 3 inch demo, tool is now 4 inch all calibrated. Returning system to Stanford. From lindaohara at snf.stanford.edu Thu Mar 25 15:43:55 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 25 Mar 2010 15:43:55 -0700 Subject: Comment asml SNF 2010-03-25 15:43:53: ASML Released Reservations 15:30-18:00 Message-ID: From lindaohara at snf.stanford.edu Fri Mar 26 08:19:42 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 26 Mar 2010 08:19:42 -0700 Subject: Comment asml SNF 2010-03-26 08:19:42: ASML 4" Demo Message-ID: From lindaohara at snf.stanford.edu Fri Mar 26 12:21:34 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 26 Mar 2010 12:21:34 -0700 Subject: Comment asml SNF 2010-03-26 12:21:33: ASML Released Reservations 12:30-14:00 Message-ID: From mahnaz at stanford.edu Mon Mar 29 09:06:48 2010 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Mon, 29 Mar 2010 09:06:48 -0700 Subject: Comment asml SNF 2010-03-19 16:28:20: Dedicated SRD cassette In-Reply-To: <20100319232821.97C0918F6F8@smtp.stanford.edu> References: <20100319232821.97C0918F6F8@smtp.stanford.edu> Message-ID: <4BB0D018.2090907@stanford.edu> Hi Robin, I think that is a good idea. Let me talk to Uli and see How we will go about designation of it. I have to find a different color box. Uli any Ideas? mahnaz king at snf.stanford.edu wrote: > A suggestion to consider dedicating a cleaner teflon cassette for the litho SRD, to be used before going into the ASML tool. Tthe random litho cassettes frequently have lots of PR particles (as you'd expect, not a complaint). Thanks. > > From kreifels at snf.stanford.edu Tue Mar 30 06:18:48 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Tue, 30 Mar 2010 06:18:48 -0700 Subject: Comment asml SNF 2010-03-30 06:18:46: starting 3inch demo Message-ID: From kreifels at snf.stanford.edu Tue Mar 30 16:31:59 2010 From: kreifels at snf.stanford.edu (kreifels at snf.stanford.edu) Date: Tue, 30 Mar 2010 16:31:59 -0700 Subject: Comment asml SNF 2010-03-30 16:31:58: 3 inch demo is completed Message-ID: system is now 4 inch and calibratied. returning system to Stanford From gsosa at snf.stanford.edu Wed Mar 31 06:47:57 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:47:57 -0700 Subject: Comment asml SNF 2010-02-23 08:42:55: Purge Hood Installation Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:48:04 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:48:04 -0700 Subject: Comment asml SNF 2010-02-23 15:11:54: Hotspot CK-PlS CHECK BACK OF YOUR WAFERS Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:48:12 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:48:12 -0700 Subject: Comment asml SNF 2010-02-23 15:25:26: extraction hood update Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:48:23 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:48:23 -0700 Subject: Comment asml SNF 2010-02-25 07:46:38: ASML 3" DEMO Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:48:29 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:48:29 -0700 Subject: Comment asml SNF 2010-02-25 18:56:52: 4 inch conversion status Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:48:36 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:48:36 -0700 Subject: Comment asml SNF 2010-02-26 11:04:38: HotSpot on chuck removed Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:48:42 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:48:42 -0700 Subject: Comment asml SNF 2010-03-02 06:14:43: starting 3inch conversion Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:48:50 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:48:50 -0700 Subject: Comment asml SNF 2010-03-03 09:20:41: daily PM completed Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:49:02 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:49:02 -0700 Subject: Comment asml SNF 2010-03-04 07:32:35: Perform daily PM Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:49:08 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:49:08 -0700 Subject: Comment asml SNF 2010-03-09 13:30:17: monthly pm completed Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:49:15 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:49:15 -0700 Subject: Comment asml SNF 2010-03-10 11:57:31: ASML Free 12:00-13:00 Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:49:20 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:49:20 -0700 Subject: Comment asml SNF 2010-03-11 07:57:37: ASML 3" DEMO Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:49:25 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:49:25 -0700 Subject: Comment asml SNF 2010-03-11 16:34:56: ASML 4" UP Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:49:32 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:49:32 -0700 Subject: Comment asml SNF 2010-03-11 16:36:01: ASML Released Reservations 16:30-20:00 Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:49:37 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:49:37 -0700 Subject: Comment asml SNF 2010-03-12 10:15:16: Hotspot 03/11 Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:49:42 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:49:42 -0700 Subject: Comment asml SNF 2010-03-16 11:34:39: daily PM and new backup script Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:49:47 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:49:47 -0700 Subject: Comment asml SNF 2010-03-16 11:35:46: system released Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:49:53 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:49:53 -0700 Subject: Comment asml SNF 2010-03-17 13:13:47: Released ASML Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:49:58 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:49:58 -0700 Subject: Comment asml SNF 2010-03-18 17:01:56: 3 inch demo completed Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:50:04 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:50:04 -0700 Subject: Comment asml SNF 2010-03-18 17:13:20: released system to Stanford Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:50:10 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:50:10 -0700 Subject: Comment asml SNF 2010-03-19 08:32:05: daily PM and Lamp change Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:50:16 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:50:16 -0700 Subject: Comment asml SNF 2010-03-19 10:30:51: tool status Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:50:27 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:50:27 -0700 Subject: Comment asml SNF 2010-03-22 09:20:24: Lockup is cleared Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:50:33 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:50:33 -0700 Subject: Comment asml SNF 2010-03-23 13:33:05: extraction hood status Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:50:39 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:50:39 -0700 Subject: Comment asml SNF 2010-03-24 11:10:15: ASML Released Reservations 11:00-14:00 Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:50:48 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:50:48 -0700 Subject: Comment asml SNF 2010-03-25 06:14:06: Starting 3 inch demo Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:50:55 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:50:55 -0700 Subject: Comment asml SNF 2010-03-25 15:16:24: 3 inch demo is complete Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:51:01 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:51:01 -0700 Subject: Comment asml SNF 2010-03-25 15:43:53: ASML Released Reservations 15:30-18:00 Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:51:17 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:51:17 -0700 Subject: Comment asml SNF 2010-03-26 08:19:42: ASML 4" Demo Message-ID: To Archives From gsosa at snf.stanford.edu Wed Mar 31 06:51:23 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 31 Mar 2010 06:51:23 -0700 Subject: Comment asml SNF 2010-03-26 12:21:33: ASML Released Reservations 12:30-14:00 Message-ID: To Archives From lindaohara at snf.stanford.edu Wed Mar 31 07:51:38 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 31 Mar 2010 07:51:38 -0700 Subject: Comment asml SNF 2010-03-31 07:51:38: ASML DEMO 8:00-12:00 Message-ID: From mrlin at snf.stanford.edu Wed Mar 31 17:56:50 2010 From: mrlin at snf.stanford.edu (mrlin at snf.stanford.edu) Date: Wed, 31 Mar 2010 17:56:50 -0700 Subject: Problem asml SNF 2010-03-31 17:56:50: elevator case broken Message-ID: the hinges of the elevator case are broken for port 4. seems like the plastic fatigued and just snapped.