Comment asml SNF 2010-03-18 17:01:56: 3 inch demo completed

kreifels at snf.stanford.edu kreifels at snf.stanford.edu
Thu Mar 18 17:01:56 PDT 2010


3 inch demo is completed, tool is converted back to 4 inch, all calibrations are completed. currently running unif and iqc, then tool will be released to stanford.




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